A varifocal micromirror with pure parabolic surface using bending moment drive

Ryohei Hokari, Kazuhiro Hane

Research output: Chapter in Book/Report/Conference proceedingConference contribution

2 Citations (Scopus)

Abstract

We propose a method to generate a pure parabolic surface of varifocal micromirror by applying a bending moment to the circumference of the micromirror. Pure paraboloid can focus light without aberration as one of the ideal mirror surfaces. In the conventional method, varifocal mirror generates an approximate spherical surface or a paraboloid-like surface by applying a distributed load to the central part of the mirror with parallel plate electrodes. In this study, the micromirror is deformed only by applying a bending moment to the circumference of the mirror in order to generate an ideal paraiboloid. The proposed mirror was fabricated from SOI wafer. The deviation of the varifocal mirror from the ideal parabolid was measured to smallar than 5nm for the 400μm diameter mirror with the focal lengths from the infinity to 24mm at the voltages from 0 to 215V.

Original languageEnglish
Title of host publication2008 IEEE/LEOS International Conference on Optical MEMS and Nanophotonics, OPT MEMS
Pages92-93
Number of pages2
DOIs
Publication statusPublished - 2008 Oct 23
Event2008 IEEE/LEOS International Conference on Optical MEMS and Nanophotonics, OPT MEMS - Freiburg, Germany
Duration: 2008 Aug 112008 Aug 14

Publication series

Name2008 IEEE/LEOS International Conference on Optical MEMS and Nanophotonics, OPT MEMS

Other

Other2008 IEEE/LEOS International Conference on Optical MEMS and Nanophotonics, OPT MEMS
Country/TerritoryGermany
CityFreiburg
Period08/8/1108/8/14

Keywords

  • Bending moment
  • Micromirror
  • Paraboloid
  • Varifocus

ASJC Scopus subject areas

  • Electrical and Electronic Engineering

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