A Two‐Wire Silicon Capacitive Accelerometer

Differential capacitive accelerometers have been fabricated using silicon micromachining, and a capacitance‐detection circuit and hybrid two‐wire sensing system have been realized. The features of the differential capacitive accelerometer are the small influence of both acceleration at other axes and temperature and in restrained parasitic capacitance due to the concentration of efforts on the structural design of the sensor. The sensitivity of the sensor depends on the residual stress in beams supporting the weight. By careful design of the capacitance‐detection circuit, the effect of both power supply voltage and temperature is small while the output signal of the sensor can be obtained from the current flowing in the two wires for power supply.