The two-dimensional automatic alignment system with an optical aperture is developed. The optical aperture with four integrated photodiode cells for feedback control signal is fabricated by MEMS techniques. The translation stage of the system is driven by four shape-memory-alloy positioning actuators to realize two-dimensional (XY-plane) movement.
- Automatic alignment
- Optical aperture
- SMA positioning actuator
ASJC Scopus subject areas
- Electronic, Optical and Magnetic Materials
- Atomic and Molecular Physics, and Optics
- Electrical and Electronic Engineering