A two-degree-of-freedom linear encoder for measurement of position and straightness

Akihide Kimura, Yoshikazu Arai, I Ko

Research output: Chapter in Book/Report/Conference proceedingConference contribution

5 Citations (Scopus)

Abstract

A new displacement sensor, the two-DOF linear encoder, is proposed to measure not only the X-directional position but also the Z-directional straightness of a linear stage. The prototype of the two-DOF linear encoder is developed experiments are carried out to evaluate basic performances of the sensor. The working distance is approximately 5 mm. Interpolation error is about ±1 %, which is equal to approximately ±16 nm and ±3 nm as X- and Z-displacements respectively. Resolution is under 0.5 nm in the X- and Z- directions. Future work is measuring of the X-directional position and the Z-directional straightness of the precision linear stage.

Original languageEnglish
Title of host publicationProceedings of the 23rd Annual Meeting of the American Society for Precision Engineering, ASPE 2008 and the 12th ICPE
Publication statusPublished - 2008 Dec 1
Event23rd Annual Meeting of the American Society for Precision Engineering, ASPE 2008 and the 12th ICPE - Portland, OR, United States
Duration: 2008 Oct 192008 Oct 24

Publication series

NameProceedings of the 23rd Annual Meeting of the American Society for Precision Engineering, ASPE 2008 and the 12th ICPE

Other

Other23rd Annual Meeting of the American Society for Precision Engineering, ASPE 2008 and the 12th ICPE
CountryUnited States
CityPortland, OR
Period08/10/1908/10/24

ASJC Scopus subject areas

  • Mechanical Engineering

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