A two-axis Lloyd's mirror interferometer for fabrication of two-dimensional diffraction gratings

Xinghui Li; Wei Gao; Yuki Shimizu; So Ito

doi:10.1016/j.cirp.2014.02.001

A two-axis Lloyd's mirror interferometer for fabrication of two-dimensional diffraction gratings

Xinghui Li, Wei Gao, Yuki Shimizu, So Ito

ENG - Finemechanics

Research output: Contribution to journal › Article › peer-review

50 Citations (Scopus)

Abstract

A new two-axis Lloyd's mirror interferometer based on multi-beam interference is proposed. A square grating substrate with normal in the Z-axis is placed edge to edge with two rectangular mirrors with normals parallel to the XZ-plane (X-mirror) and the YZ-plane (Y-mirror), respectively. The angle between the substrate and each mirror is set to be larger than 90°, so that the beams reflected by the mirrors can be superimposed with the direct beam at the substrate to produce two-dimensional (2D) diffraction grating structures in a single exposure. Sub-micron pitched 2D hole grating structures were fabricated and evaluated.

Original language	English
Pages (from-to)	461-464
Number of pages	4
Journal	CIRP Annals - Manufacturing Technology
Volume	63
Issue number	1
DOIs	https://doi.org/10.1016/j.cirp.2014.02.001
Publication status	Published - 2014

Keywords

Interferometry
Laser
Structure

ASJC Scopus subject areas

Mechanical Engineering
Industrial and Manufacturing Engineering

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10.1016/j.cirp.2014.02.001

Cite this

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abstract = "A new two-axis Lloyd's mirror interferometer based on multi-beam interference is proposed. A square grating substrate with normal in the Z-axis is placed edge to edge with two rectangular mirrors with normals parallel to the XZ-plane (X-mirror) and the YZ-plane (Y-mirror), respectively. The angle between the substrate and each mirror is set to be larger than 90°, so that the beams reflected by the mirrors can be superimposed with the direct beam at the substrate to produce two-dimensional (2D) diffraction grating structures in a single exposure. Sub-micron pitched 2D hole grating structures were fabricated and evaluated.",

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T1 - A two-axis Lloyd's mirror interferometer for fabrication of two-dimensional diffraction gratings

AU - Li, Xinghui

AU - Gao, Wei

AU - Shimizu, Yuki

AU - Ito, So

PY - 2014

Y1 - 2014

N2 - A new two-axis Lloyd's mirror interferometer based on multi-beam interference is proposed. A square grating substrate with normal in the Z-axis is placed edge to edge with two rectangular mirrors with normals parallel to the XZ-plane (X-mirror) and the YZ-plane (Y-mirror), respectively. The angle between the substrate and each mirror is set to be larger than 90°, so that the beams reflected by the mirrors can be superimposed with the direct beam at the substrate to produce two-dimensional (2D) diffraction grating structures in a single exposure. Sub-micron pitched 2D hole grating structures were fabricated and evaluated.

AB - A new two-axis Lloyd's mirror interferometer based on multi-beam interference is proposed. A square grating substrate with normal in the Z-axis is placed edge to edge with two rectangular mirrors with normals parallel to the XZ-plane (X-mirror) and the YZ-plane (Y-mirror), respectively. The angle between the substrate and each mirror is set to be larger than 90°, so that the beams reflected by the mirrors can be superimposed with the direct beam at the substrate to produce two-dimensional (2D) diffraction grating structures in a single exposure. Sub-micron pitched 2D hole grating structures were fabricated and evaluated.

KW - Interferometry

KW - Laser

KW - Structure

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VL - 63

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EP - 464

JO - CIRP Annals - Manufacturing Technology

JF - CIRP Annals - Manufacturing Technology

SN - 0007-8506

IS - 1

ER -

A two-axis Lloyd's mirror interferometer for fabrication of two-dimensional diffraction gratings

Abstract

Keywords

ASJC Scopus subject areas

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