A two-axis Lloyd's mirror interferometer for fabrication of two-dimensional diffraction gratings

Xinghui Li, Wei Gao, Yuki Shimizu, So Ito

Research output: Contribution to journalArticlepeer-review

46 Citations (Scopus)

Abstract

A new two-axis Lloyd's mirror interferometer based on multi-beam interference is proposed. A square grating substrate with normal in the Z-axis is placed edge to edge with two rectangular mirrors with normals parallel to the XZ-plane (X-mirror) and the YZ-plane (Y-mirror), respectively. The angle between the substrate and each mirror is set to be larger than 90°, so that the beams reflected by the mirrors can be superimposed with the direct beam at the substrate to produce two-dimensional (2D) diffraction grating structures in a single exposure. Sub-micron pitched 2D hole grating structures were fabricated and evaluated.

Original languageEnglish
Pages (from-to)461-464
Number of pages4
JournalCIRP Annals - Manufacturing Technology
Volume63
Issue number1
DOIs
Publication statusPublished - 2014

Keywords

  • Interferometry
  • Laser
  • Structure

ASJC Scopus subject areas

  • Mechanical Engineering
  • Industrial and Manufacturing Engineering

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