Abstract
A new two-axis Lloyd's mirror interferometer based on multi-beam interference is proposed. A square grating substrate with normal in the Z-axis is placed edge to edge with two rectangular mirrors with normals parallel to the XZ-plane (X-mirror) and the YZ-plane (Y-mirror), respectively. The angle between the substrate and each mirror is set to be larger than 90°, so that the beams reflected by the mirrors can be superimposed with the direct beam at the substrate to produce two-dimensional (2D) diffraction grating structures in a single exposure. Sub-micron pitched 2D hole grating structures were fabricated and evaluated.
| Original language | English |
|---|---|
| Pages (from-to) | 461-464 |
| Number of pages | 4 |
| Journal | CIRP Annals - Manufacturing Technology |
| Volume | 63 |
| Issue number | 1 |
| DOIs | |
| Publication status | Published - 2014 |
Keywords
- Interferometry
- Laser
- Structure
ASJC Scopus subject areas
- Mechanical Engineering
- Industrial and Manufacturing Engineering