This Letter focuses on the discovery of a transparent conducting oxide (TCO), anatase Ti1-xNbxO2 films with x=0.002-0.2. The resistivity of films with x≥0.03 is 2-3 × 10 -4 Ω cm at room temperature. The carrier density of Ti 1-xNbxO2 can be controlled in a range of 1 × 1019 to 2 × 1021 cm-3. The internal transmittance for films with x≤0.03 (40 nm thickness) is about 97% in the visible light region. The transport and optical parameters are comparable to those of typical TCOs, such as In2-xSnxO3 and ZnO.
ASJC Scopus subject areas
- Physics and Astronomy (miscellaneous)