A three-axis autocollimator for detection of angular error motions of a precision stage

W. Gao, Y. Saito, H. Muto, Y. Arai, Y. Shimizu

Research output: Contribution to journalArticle

49 Citations (Scopus)

Abstract

This paper presents a new autocollimator that can simultaneously detect the three-axis angular error motions (pitch, yaw, and roll errors) of a precision linear stage. A collimated laser beam from a laser diode is projected onto a grating reflector mounted on the stage. The reflected 0th-order diffracted beam is received by an autocollimation unit, which consists of a collimator objective and a quadrant photodiode, for detecting the pitch and yaw errors. The reflected 1st-order diffracted beam is received by another autocollimation unit for detecting the roll error. Experiments were carried out to evaluate the basic performance of the prototype sensor.

Original languageEnglish
Pages (from-to)515-518
Number of pages4
JournalCIRP Annals - Manufacturing Technology
Volume60
Issue number1
DOIs
Publication statusPublished - 2011 Apr 12

Keywords

  • Metrology
  • Motion
  • Sensor

ASJC Scopus subject areas

  • Mechanical Engineering
  • Industrial and Manufacturing Engineering

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