A thin-film bulk acoustic resonator and filter with optimal edge shapes for mass production

Motoaki Hara, Masanori Ueda, Yoshio Satoh

    Research output: Contribution to journalArticlepeer-review

    4 Citations (Scopus)

    Abstract

    The manufacturing conditions of a thin-film bulk acoustic resonator (FBAR) filter were investigated to obtain a high Q factor which is stable for mass production. The FBAR consist of patterned electrodes and piezoelectric films. In this study, the influence of edge shape of the films on the anti-resonance characteristics was investigated using a numerical method. Optimized shape was applied to a 2.5-GHz band resonator and filter. As a result, significant improvement of the Q factor and the insertion loss was confirmed.

    Original languageEnglish
    Pages (from-to)90-96
    Number of pages7
    JournalUltrasonics
    Volume53
    Issue number1
    DOIs
    Publication statusPublished - 2013 Jan

    Keywords

    • FBAR
    • FEM
    • Filter
    • Q factor

    ASJC Scopus subject areas

    • Acoustics and Ultrasonics

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