A theory for multi damage evaluation of TiN thin film

Kazunori Misawa, Tomonaga Okabe, Masaaki Yanaka, Masao Shimizu, Nobuo Takeda

Research output: Contribution to journalArticle

Abstract

The present paper experimentally studies the cracking phenomena of a TiN thin film on a titanium alloy, and presents a new approach to predict the number of cracks under tensile load. An elastoplastic shear-lag model is developed to obtain the stress distribution caused by the film cracks, which is found to agree well with that calculated with FEM. The number of thin film cracks is predicted using a Monte Carlo simulation using the present approach, and favourably compared with the experimental results.

Original languageEnglish
Pages (from-to)Z7.10.1-Z7.10.6
JournalMaterials Research Society Symposium-Proceedings
Volume653
Publication statusPublished - 2001
Externally publishedYes

ASJC Scopus subject areas

  • Materials Science(all)
  • Condensed Matter Physics
  • Mechanics of Materials
  • Mechanical Engineering

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  • Cite this

    Misawa, K., Okabe, T., Yanaka, M., Shimizu, M., & Takeda, N. (2001). A theory for multi damage evaluation of TiN thin film. Materials Research Society Symposium-Proceedings, 653, Z7.10.1-Z7.10.6.