A test circuit for extremely low gate leakage current measurement of 10 aA for 80,000 MOSFETs in 80 s

Y. Kumagai, T. Inatsuka, R. Kuroda, Akinobu Teramoto, T. Suwa, S. Sugawa, T. Ohmi

Research output: Chapter in Book/Report/Conference proceedingConference contribution

3 Citations (Scopus)

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Engineering & Materials Science