A surrounding isolation-merged plate electrode (SIMPLE) cell with checkered layout for 256 Mbit DRAMs and beyond

T. Ozaki, A. Nitayama, K. Sunouchi, H. Takato, S. Takedai, A. Yagishita, K. Hieda, F. Horiguchi

Research output: Chapter in Book/Report/Conference proceedingConference contribution

2 Citations (Scopus)

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