A surface acoustic wave dynamics control device by grating structure

Masahiro Miyashita, Teppei Onuki, Sumito Nagasawa, Hiroshi Kuwano

Research output: Chapter in Book/Report/Conference proceedingConference contribution

2 Citations (Scopus)

Abstract

We have developed the dynamic controlling system of surface acoustic wave (SAW) using micro electromechanical structures, using a plate with periodic convex structures as a mechanical switch of the SAW's resonant condition. The effects of the geographical change on the substrate surface by the active control were investigated using the numerical analysis. And we verified the effect of spectrum shaping by the engraved grating structure, and the controlling effect of the resonant condition with the control plate on the grating structure experimentally.

Original languageEnglish
Title of host publicationMEMS 2008 Tucson - 21st IEEE International Conference on Micro Electro Mechanical Systems
Pages661-664
Number of pages4
DOIs
Publication statusPublished - 2008 Aug 29
Event21st IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2008 Tucson - Tucson, AZ, United States
Duration: 2008 Jan 132008 Jan 17

Publication series

NameProceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)
ISSN (Print)1084-6999

Other

Other21st IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2008 Tucson
CountryUnited States
CityTucson, AZ
Period08/1/1308/1/17

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Condensed Matter Physics
  • Mechanical Engineering
  • Electrical and Electronic Engineering

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    Miyashita, M., Onuki, T., Nagasawa, S., & Kuwano, H. (2008). A surface acoustic wave dynamics control device by grating structure. In MEMS 2008 Tucson - 21st IEEE International Conference on Micro Electro Mechanical Systems (pp. 661-664). [4443743] (Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)). https://doi.org/10.1109/MEMSYS.2008.4443743