A super-precision evaluation method of ultra-low expansion glasses using the line-focus-beam ultrasonic material characterization system

Jun Ichi Kushibiki, Mototaka Arakawa, Yuji Ohashi, Kouji Suzuki, Takahisa Maruyama

Research output: Contribution to journalConference article

Abstract

A super-precision evaluation method of the coefficient of thermal expansion (CTE) of ultra-low expansion glasses was developed using the line-focus-beam ultrasonic material characterization (LFB-UMC) system. Evaluation was demonstrated for TiO2-SiO2 glass. The sensitivity and resolution in the velocity measurement of leaky surface acoustic waves (LSAWs) in CTE were estimated to be 4.40 (ppb/K)/(m/s) and ±0.77 ppb/K for ±2σ (a: standard deviation) at 225 MHz. LSAW velocity differences caused by different TiO2 concentrations and distributions or striae in the specimens were successfully detected and evaluated, providing two-dimensional information under the nondestructive and noncontact measurement condition. This ultrasonic method is much more accurate than conventional methods, for evaluating CTE on the surface of ultra-low-expansion glass materials needed for extreme ultra-violet lithography (EUVL) systems.

Original languageEnglish
Article number104
Pages (from-to)961-965
Number of pages5
JournalProgress in Biomedical Optics and Imaging - Proceedings of SPIE
Volume5752
Issue numberII
DOIs
Publication statusPublished - 2005 Sep 19
EventMetrology, Inspection, and Process Control for Microlithography XIX - San Jose, CA, United States
Duration: 2005 Feb 282005 Mar 3

Keywords

  • CTE evaluation
  • EUVL system
  • Leaky surface acoustic waves
  • Line-focus-beam ultrasonic material characterization system
  • TiO -SiO glass
  • Ultra-low expansion glasses
  • Velocity measurement

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Biomaterials
  • Atomic and Molecular Physics, and Optics
  • Radiology Nuclear Medicine and imaging

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