A study on cantilever-type FePd/PZT stacked-layer magnetic sensor with high sensitivity

Takashi Saito, Mio Hamashima, Chihiro Saito, Motoichi Nakamura, Teiko Okazaki, Yasubumi Furuya, Hideo Muro

Research output: Contribution to journalArticle

2 Citations (Scopus)

Abstract

The FePd/PZT/FePd and the FePd/PZT stacked-layer magnetic sensors were studied. A magnetic field was applied to the longitudinal direction of the sensor to cause a longitudinal stress magnetostrictively, which produces a piezoelectric output voltage in the PZT layer. The prototype sensors are 15 mm long and 6 mm wide and the thicknesses of the FePd layer and PZT layer are 10 μm and 330 μm, respectively. The theoretical sensitivities of the FePd/PZT/FePd sensor and the FePd/PZT sensor using a simple cantilever model were calculated to be 0.29 mV/A/m and 0.15 mV/A/m, respectively. The measured sensitivities agreed reasonably with the calculated ones.

Original languageEnglish
Pages (from-to)183-188
Number of pages6
JournalIEEJ Transactions on Sensors and Micromachines
Volume132
Issue number7
DOIs
Publication statusPublished - 2012
Externally publishedYes

Keywords

  • Magnetostrictive
  • Piezoelectric
  • Stacked layer
  • magnetic sensor

ASJC Scopus subject areas

  • Mechanical Engineering
  • Electrical and Electronic Engineering

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