A study of the thin film bulk acoustic resonator filters in several ten GHz band

Motoaki Hara, Tsuyoshi Yokoyama, Takeshi Sakashita, Masanori Ueda, Yoshio Satoh

    Research output: Chapter in Book/Report/Conference proceedingConference contribution

    15 Citations (Scopus)

    Abstract

    The first K to Ka band filters using thin film bulk acoustic resonators (FBARs) have been developed. The filters are ladder type filters configured with air-gap type FBARs and designed using an equivalent circuit based on a Butterworth-Van-Dyke (BVD) model. Center frequency, fractional bandwidth, minimum insertion loss and suppression in out-band were 23.8 GHz, 3.4%, -3.8 dB and -13 dB in the K band filter, and were 29.2 GHz, 3.4%, -3.8 dB and -11 dB in the Ka band filter, respectively. 24.7 GHz in resonant frequency, 285 in resonant Q, 291 in anti-resonant Q and 6.0% in effective electro-mechanical coupling coefficient keff 2 were obtained in the K band FBAR. Additionally, it was derived and verified experimentally that the loss is proportional to the product of the resonant frequency and the capacitance ratio in the FBAR. This relation allowed the limitation of the FBAR filter to be discussed for higher frequencies.

    Original languageEnglish
    Title of host publication2009 IEEE International Ultrasonics Symposium and Short Courses, IUS 2009
    PublisherInstitute of Electrical and Electronics Engineers Inc.
    Pages851-854
    Number of pages4
    ISBN (Print)9781424443895
    DOIs
    Publication statusPublished - 2009
    Event2009 IEEE International Ultrasonics Symposium, IUS 2009 - Rome, Italy
    Duration: 2009 Sep 202009 Sep 23

    Publication series

    NameProceedings - IEEE Ultrasonics Symposium
    ISSN (Print)1051-0117

    Other

    Other2009 IEEE International Ultrasonics Symposium, IUS 2009
    Country/TerritoryItaly
    CityRome
    Period09/9/2009/9/23

    Keywords

    • Component
    • FBAR
    • K band
    • Ka band

    ASJC Scopus subject areas

    • Acoustics and Ultrasonics

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