A study of blister formation in ALD Al2O3 grown on silicon

Bart Vermang, Hans Goverde, Veerle Simons, Ingrid De Wolf, Johan Meersschaut, Shuji Tanaka, Joachim John, Jef Poortmans, Robert Mertens

Research output: Chapter in Book/Report/Conference proceedingConference contribution

14 Citations (Scopus)

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Engineering & Materials Science