A spiral scanning-type AFM for high-speed and large-area measurement

Yuguo Cui, Gaofa He, Yoshikazu Arai, Takemi Asai, I Ko

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

This paper presents a spiral scanning-type AFM for high-speed and large-area measurement. The AFM is composed of an air-bearing linear stage and an air-bearing spindle for fast XY scanning. An AFM probe-unit for the Z-direction measurement is mounted on the linear stage. The spiral XY scanning is conducted by synchronizing the motions of the linear stage and the spindle. The mechanical bandwidth of the Zdirectional AFM probe-unit in constant height mode is confirmed to be over 40 kHz. It takes approximately 40 seconds for measurement of an area with a diameter of 4 mm. Influence of the bandwidth of the electronics of the AFM cantilever sensor on the measurement speed is investigated.

Original languageEnglish
Title of host publicationProceedings of the 10th Anniversary International Conference of the European Society for Precision Engineering and Nanotechnology, EUSPEN 2008
EditorsHendrik Van Brussel, E. Brinksmeier, H. Spaan, T. Burke
Publishereuspen
Pages384-388
Number of pages5
ISBN (Electronic)9780955308253
Publication statusPublished - 2008 Jan 1
Event10th Anniversary International Conference of the European Society for Precision Engineering and Nanotechnology, EUSPEN 2008 - Zurich, Switzerland
Duration: 2008 May 182008 May 22

Publication series

NameProceedings of the 10th Anniversary International Conference of the European Society for Precision Engineering and Nanotechnology, EUSPEN 2008
Volume2

Other

Other10th Anniversary International Conference of the European Society for Precision Engineering and Nanotechnology, EUSPEN 2008
CountrySwitzerland
CityZurich
Period08/5/1808/5/22

ASJC Scopus subject areas

  • Instrumentation
  • Mechanical Engineering
  • Materials Science(all)
  • Environmental Engineering
  • Industrial and Manufacturing Engineering

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