A solidly mounted, high frequency, thickness shear mode bulk acoustic wave resonator using X-LiTaO3thin plate and SiO2/Ta multilayer acoustic films

Michio Kadota, Yoshimi Ishii, Shuji Tanaka

Research output: Contribution to journalArticlepeer-review

Fingerprint

Dive into the research topics of 'A solidly mounted, high frequency, thickness shear mode bulk acoustic wave resonator using X-LiTaO<sub>3</sub>thin plate and SiO<sub>2</sub>/Ta multilayer acoustic films'. Together they form a unique fingerprint.

Engineering & Materials Science

Physics & Astronomy