A soft-X-ray imaging microscope with a multilayer-coated schwarzschild objective: Imaging tests

Mitsunori Toyoda, Yoshitaka Shitani, Mihiro Yanagihara, Takeo Ejima, Masaki Yamamoto, Makoto Watanabe

Research output: Contribution to journalArticle

24 Citations (Scopus)

Abstract

We constructed a soft-X-ray imaging microscope based on a multilayer-coated Schwarzschild objective. It provides an element-sensitive image in terms of the characteristic soft X-rays selectively reflected by the multilayer coating. The Schwarzschild objective was designed to have a 50× magnification and a numerical aperture of 0.25. The mirrors of the objective were coated with Mo/Si multilayers to reflect the Si L emission. The overall throughput of the objective was 14% at a peak wavelength of 13.3 nm. The 5-μm-wide stripe of lithographically patterned SiO2 was observed under irradiation with an electron beam of 1 μA accelerated to 2.5 kV.

Original languageEnglish
Pages (from-to)1926-1929
Number of pages4
JournalJapanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers
Volume39
Issue number4 A
DOIs
Publication statusPublished - 2000

Keywords

  • Imaging microscope
  • Microscope
  • Multilayer
  • Normal incidence optics
  • Soft-X-ray emission

ASJC Scopus subject areas

  • Engineering(all)
  • Physics and Astronomy(all)

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