A slanted InP waveguide for fiber coupler using skewed dry etching process

S. Choi, A. Higo, K. Kikuta, H. Toshiyoshi, Y. Nakano

    Research output: Chapter in Book/Report/Conference proceedingConference contribution

    Abstract

    We propose a simple and efficient off-chip coupler for vertical coupling between optical fibers and InP-based slab waveguides. Etching angle of the waveguide edge is controlled by an etching jig made of SiO2-coated aluminum for ICP-RIE. Simulation shows that maximum 71% coupling efficiency would be obtained by matrix expansion methods.

    Original languageEnglish
    Title of host publication2012 International Conference on Optical MEMS and Nanophotonics, OMN 2012
    Pages202-203
    Number of pages2
    DOIs
    Publication statusPublished - 2012 Nov 22
    Event2012 International Conference on Optical MEMS and Nanophotonics, OMN 2012 - Banff, AB, Canada
    Duration: 2012 Aug 62012 Aug 9

    Publication series

    NameInternational Conference on Optical MEMS and Nanophotonics
    ISSN (Print)2160-5033
    ISSN (Electronic)2160-5041

    Other

    Other2012 International Conference on Optical MEMS and Nanophotonics, OMN 2012
    CountryCanada
    CityBanff, AB
    Period12/8/612/8/9

    ASJC Scopus subject areas

    • Hardware and Architecture
    • Electrical and Electronic Engineering
    • Electronic, Optical and Magnetic Materials

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