A Silicon Photonic MEMS Matrix Switch Using Directional Couplers in Comparison with that Using Adiabatic Couplers

Takumi Nagai, Kazuhiro Hane

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

Silicon photonic waveguide matrix switch using ultra-small electrostatic actuators attracts attentions. In this report, a small matrix switch using directional couplers is designed, fabricated and tested. Since the directional coupler (10μm) is shorter than our previous adiabatic coupler (50μm), the size of matrix switch can be decreased. At a coupler gap of 88nm, the port isolation of single switch cell was 12 dB. The switching time was 16 μsec. A 4 × 4 matrix switch was also fabricated and tested.

Original languageEnglish
Title of host publication2019 20th International Conference on Solid-State Sensors, Actuators and Microsystems and Eurosensors XXXIII, TRANSDUCERS 2019 and EUROSENSORS XXXIII
PublisherInstitute of Electrical and Electronics Engineers Inc.
Pages1533-1536
Number of pages4
ISBN (Electronic)9781728120072
DOIs
Publication statusPublished - 2019 Jun
Event20th International Conference on Solid-State Sensors, Actuators and Microsystems and Eurosensors XXXIII, TRANSDUCERS 2019 and EUROSENSORS XXXIII - Berlin, Germany
Duration: 2019 Jun 232019 Jun 27

Publication series

Name2019 20th International Conference on Solid-State Sensors, Actuators and Microsystems and Eurosensors XXXIII, TRANSDUCERS 2019 and EUROSENSORS XXXIII

Conference

Conference20th International Conference on Solid-State Sensors, Actuators and Microsystems and Eurosensors XXXIII, TRANSDUCERS 2019 and EUROSENSORS XXXIII
CountryGermany
CityBerlin
Period19/6/2319/6/27

Keywords

  • Optical switch
  • comb actuator
  • coupler
  • silicon waveguide

ASJC Scopus subject areas

  • Process Chemistry and Technology
  • Spectroscopy
  • Electrical and Electronic Engineering
  • Mechanical Engineering
  • Electronic, Optical and Magnetic Materials
  • Control and Optimization
  • Instrumentation

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  • Cite this

    Nagai, T., & Hane, K. (2019). A Silicon Photonic MEMS Matrix Switch Using Directional Couplers in Comparison with that Using Adiabatic Couplers. In 2019 20th International Conference on Solid-State Sensors, Actuators and Microsystems and Eurosensors XXXIII, TRANSDUCERS 2019 and EUROSENSORS XXXIII (pp. 1533-1536). [8808766] (2019 20th International Conference on Solid-State Sensors, Actuators and Microsystems and Eurosensors XXXIII, TRANSDUCERS 2019 and EUROSENSORS XXXIII). Institute of Electrical and Electronics Engineers Inc.. https://doi.org/10.1109/TRANSDUCERS.2019.8808766