TY - GEN
T1 - A Silicon Photonic MEMS Matrix Switch Using Directional Couplers in Comparison with that Using Adiabatic Couplers
AU - Nagai, Takumi
AU - Hane, Kazuhiro
N1 - Funding Information:
Authors thank Drs. Y. Kanamori, T. Sasaki, Y. Zhai, W. Wang, and other researchers for their useful suggestions and discussions. The fabrications were carried out in Micro/Nano Center of Tohoku University.
Publisher Copyright:
© 2019 IEEE.
PY - 2019/6
Y1 - 2019/6
N2 - Silicon photonic waveguide matrix switch using ultra-small electrostatic actuators attracts attentions. In this report, a small matrix switch using directional couplers is designed, fabricated and tested. Since the directional coupler (10μm) is shorter than our previous adiabatic coupler (50μm), the size of matrix switch can be decreased. At a coupler gap of 88nm, the port isolation of single switch cell was 12 dB. The switching time was 16 μsec. A 4 × 4 matrix switch was also fabricated and tested.
AB - Silicon photonic waveguide matrix switch using ultra-small electrostatic actuators attracts attentions. In this report, a small matrix switch using directional couplers is designed, fabricated and tested. Since the directional coupler (10μm) is shorter than our previous adiabatic coupler (50μm), the size of matrix switch can be decreased. At a coupler gap of 88nm, the port isolation of single switch cell was 12 dB. The switching time was 16 μsec. A 4 × 4 matrix switch was also fabricated and tested.
KW - Optical switch
KW - comb actuator
KW - coupler
KW - silicon waveguide
UR - http://www.scopus.com/inward/record.url?scp=85071927737&partnerID=8YFLogxK
UR - http://www.scopus.com/inward/citedby.url?scp=85071927737&partnerID=8YFLogxK
U2 - 10.1109/TRANSDUCERS.2019.8808766
DO - 10.1109/TRANSDUCERS.2019.8808766
M3 - Conference contribution
AN - SCOPUS:85071927737
T3 - 2019 20th International Conference on Solid-State Sensors, Actuators and Microsystems and Eurosensors XXXIII, TRANSDUCERS 2019 and EUROSENSORS XXXIII
SP - 1533
EP - 1536
BT - 2019 20th International Conference on Solid-State Sensors, Actuators and Microsystems and Eurosensors XXXIII, TRANSDUCERS 2019 and EUROSENSORS XXXIII
PB - Institute of Electrical and Electronics Engineers Inc.
T2 - 20th International Conference on Solid-State Sensors, Actuators and Microsystems and Eurosensors XXXIII, TRANSDUCERS 2019 and EUROSENSORS XXXIII
Y2 - 23 June 2019 through 27 June 2019
ER -