A Silicon Photonic MEMS Matrix Switch Using Directional Couplers in Comparison with that Using Adiabatic Couplers

Takumi Nagai; Kazuhiro Hane

doi:10.1109/TRANSDUCERS.2019.8808766

A Silicon Photonic MEMS Matrix Switch Using Directional Couplers in Comparison with that Using Adiabatic Couplers

Takumi Nagai, Kazuhiro Hane

ENG - Finemechanics

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

Abstract

Silicon photonic waveguide matrix switch using ultra-small electrostatic actuators attracts attentions. In this report, a small matrix switch using directional couplers is designed, fabricated and tested. Since the directional coupler (10μm) is shorter than our previous adiabatic coupler (50μm), the size of matrix switch can be decreased. At a coupler gap of 88nm, the port isolation of single switch cell was 12 dB. The switching time was 16 μsec. A 4 × 4 matrix switch was also fabricated and tested.

Original language	English
Title of host publication	2019 20th International Conference on Solid-State Sensors, Actuators and Microsystems and Eurosensors XXXIII, TRANSDUCERS 2019 and EUROSENSORS XXXIII
Publisher	Institute of Electrical and Electronics Engineers Inc.
Pages	1533-1536
Number of pages	4
ISBN (Electronic)	9781728120072
DOIs	https://doi.org/10.1109/TRANSDUCERS.2019.8808766
Publication status	Published - 2019 Jun
Event	20th International Conference on Solid-State Sensors, Actuators and Microsystems and Eurosensors XXXIII, TRANSDUCERS 2019 and EUROSENSORS XXXIII - Berlin, Germany Duration: 2019 Jun 23 → 2019 Jun 27

Publication series

Name	2019 20th International Conference on Solid-State Sensors, Actuators and Microsystems and Eurosensors XXXIII, TRANSDUCERS 2019 and EUROSENSORS XXXIII

Conference

Conference	20th International Conference on Solid-State Sensors, Actuators and Microsystems and Eurosensors XXXIII, TRANSDUCERS 2019 and EUROSENSORS XXXIII
Country	Germany
City	Berlin
Period	19/6/23 → 19/6/27

Keywords

Optical switch
comb actuator
coupler
silicon waveguide

ASJC Scopus subject areas

Process Chemistry and Technology
Spectroscopy
Electrical and Electronic Engineering
Mechanical Engineering
Electronic, Optical and Magnetic Materials
Control and Optimization
Instrumentation

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Nagai, T., & Hane, K. (2019). A Silicon Photonic MEMS Matrix Switch Using Directional Couplers in Comparison with that Using Adiabatic Couplers. In 2019 20th International Conference on Solid-State Sensors, Actuators and Microsystems and Eurosensors XXXIII, TRANSDUCERS 2019 and EUROSENSORS XXXIII (pp. 1533-1536). [8808766] (2019 20th International Conference on Solid-State Sensors, Actuators and Microsystems and Eurosensors XXXIII, TRANSDUCERS 2019 and EUROSENSORS XXXIII). Institute of Electrical and Electronics Engineers Inc.. https://doi.org/10.1109/TRANSDUCERS.2019.8808766

A Silicon Photonic MEMS Matrix Switch Using Directional Couplers in Comparison with that Using Adiabatic Couplers. / Nagai, Takumi; Hane, Kazuhiro.

2019 20th International Conference on Solid-State Sensors, Actuators and Microsystems and Eurosensors XXXIII, TRANSDUCERS 2019 and EUROSENSORS XXXIII. Institute of Electrical and Electronics Engineers Inc., 2019. p. 1533-1536 8808766 (2019 20th International Conference on Solid-State Sensors, Actuators and Microsystems and Eurosensors XXXIII, TRANSDUCERS 2019 and EUROSENSORS XXXIII).

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

Nagai, T & Hane, K 2019, A Silicon Photonic MEMS Matrix Switch Using Directional Couplers in Comparison with that Using Adiabatic Couplers. in 2019 20th International Conference on Solid-State Sensors, Actuators and Microsystems and Eurosensors XXXIII, TRANSDUCERS 2019 and EUROSENSORS XXXIII., 8808766, 2019 20th International Conference on Solid-State Sensors, Actuators and Microsystems and Eurosensors XXXIII, TRANSDUCERS 2019 and EUROSENSORS XXXIII, Institute of Electrical and Electronics Engineers Inc., pp. 1533-1536, 20th International Conference on Solid-State Sensors, Actuators and Microsystems and Eurosensors XXXIII, TRANSDUCERS 2019 and EUROSENSORS XXXIII, Berlin, Germany, 19/6/23. https://doi.org/10.1109/TRANSDUCERS.2019.8808766

Nagai T, Hane K. A Silicon Photonic MEMS Matrix Switch Using Directional Couplers in Comparison with that Using Adiabatic Couplers. In 2019 20th International Conference on Solid-State Sensors, Actuators and Microsystems and Eurosensors XXXIII, TRANSDUCERS 2019 and EUROSENSORS XXXIII. Institute of Electrical and Electronics Engineers Inc. 2019. p. 1533-1536. 8808766. (2019 20th International Conference on Solid-State Sensors, Actuators and Microsystems and Eurosensors XXXIII, TRANSDUCERS 2019 and EUROSENSORS XXXIII). https://doi.org/10.1109/TRANSDUCERS.2019.8808766

Nagai, Takumi ; Hane, Kazuhiro. / A Silicon Photonic MEMS Matrix Switch Using Directional Couplers in Comparison with that Using Adiabatic Couplers. 2019 20th International Conference on Solid-State Sensors, Actuators and Microsystems and Eurosensors XXXIII, TRANSDUCERS 2019 and EUROSENSORS XXXIII. Institute of Electrical and Electronics Engineers Inc., 2019. pp. 1533-1536 (2019 20th International Conference on Solid-State Sensors, Actuators and Microsystems and Eurosensors XXXIII, TRANSDUCERS 2019 and EUROSENSORS XXXIII).

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title = "A Silicon Photonic MEMS Matrix Switch Using Directional Couplers in Comparison with that Using Adiabatic Couplers",

abstract = "Silicon photonic waveguide matrix switch using ultra-small electrostatic actuators attracts attentions. In this report, a small matrix switch using directional couplers is designed, fabricated and tested. Since the directional coupler (10μm) is shorter than our previous adiabatic coupler (50μm), the size of matrix switch can be decreased. At a coupler gap of 88nm, the port isolation of single switch cell was 12 dB. The switching time was 16 μsec. A 4 × 4 matrix switch was also fabricated and tested.",

keywords = "Optical switch, comb actuator, coupler, silicon waveguide",

author = "Takumi Nagai and Kazuhiro Hane",

note = "Funding Information: Authors thank Drs. Y. Kanamori, T. Sasaki, Y. Zhai, W. Wang, and other researchers for their useful suggestions and discussions. The fabrications were carried out in Micro/Nano Center of Tohoku University. Publisher Copyright: {\textcopyright} 2019 IEEE.; 20th International Conference on Solid-State Sensors, Actuators and Microsystems and Eurosensors XXXIII, TRANSDUCERS 2019 and EUROSENSORS XXXIII ; Conference date: 23-06-2019 Through 27-06-2019",

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AB - Silicon photonic waveguide matrix switch using ultra-small electrostatic actuators attracts attentions. In this report, a small matrix switch using directional couplers is designed, fabricated and tested. Since the directional coupler (10μm) is shorter than our previous adiabatic coupler (50μm), the size of matrix switch can be decreased. At a coupler gap of 88nm, the port isolation of single switch cell was 12 dB. The switching time was 16 μsec. A 4 × 4 matrix switch was also fabricated and tested.

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A Silicon Photonic MEMS Matrix Switch Using Directional Couplers in Comparison with that Using Adiabatic Couplers

Abstract

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Keywords

ASJC Scopus subject areas

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