TY - JOUR
T1 - A Silicon Micromachined Resonant Angular Sensor
AU - Nagao, Masaru
AU - Minami, Kazuyuki
AU - Esashi, Masayoshi
N1 - Copyright:
Copyright 2017 Elsevier B.V., All rights reserved.
PY - 1998
Y1 - 1998
N2 - A silicon resonant angular rate sensor (gyroscope) with ring - disk - shaped resonator was fabricated using silicon bulk micromachining and its properties were investigated. The sensor consists of a glass-silicon-glass structure. The ring - disk - shaped silicon resonator has 3300μm × 3100 μm size and 30μm-thick. The resonator is suspended by four beams, and the ends of beams are anchored to a support which is in the center of the ring. The silicon structure was machined by alkali etching and reactive ion etching. Driving the resonator and detecting the vibration are performed by electrostatic forces and capacitive changes between the silicon resonator and electrodes on the glass. The resonant frequencies of the test device were 4.2kHz in driving mode and 3.5kHz in detecting mode. Although the difference in resonant frequencies between two modes was about 20%, a noise - equivalent rate of 3deg./sec was obtained at 7 Pa.
AB - A silicon resonant angular rate sensor (gyroscope) with ring - disk - shaped resonator was fabricated using silicon bulk micromachining and its properties were investigated. The sensor consists of a glass-silicon-glass structure. The ring - disk - shaped silicon resonator has 3300μm × 3100 μm size and 30μm-thick. The resonator is suspended by four beams, and the ends of beams are anchored to a support which is in the center of the ring. The silicon structure was machined by alkali etching and reactive ion etching. Driving the resonator and detecting the vibration are performed by electrostatic forces and capacitive changes between the silicon resonator and electrodes on the glass. The resonant frequencies of the test device were 4.2kHz in driving mode and 3.5kHz in detecting mode. Although the difference in resonant frequencies between two modes was about 20%, a noise - equivalent rate of 3deg./sec was obtained at 7 Pa.
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U2 - 10.1541/ieejsmas.118.212
DO - 10.1541/ieejsmas.118.212
M3 - Article
AN - SCOPUS:85024460414
VL - 118
SP - 212
EP - 217
JO - IEEJ Transactions on Sensors and Micromachines
JF - IEEJ Transactions on Sensors and Micromachines
SN - 1341-8939
IS - 3
ER -