A semiconductor-based field-effect platform for (Bio-)chemical and physical sensors: From capacitive EIS sensors and LAPS over ISFETs to nano-scale devices

Michael J. Schöning, Maryam H. Abouzar, Torsten Wagner, Niko Näther, David Rolka, Tatsuo Yoshinobu, Joachim P. Kloock, Monika Turek, Sven Ingebrandt, Arshak Poghossian

Research output: Chapter in Book/Report/Conference proceedingConference contribution

2 Citations (Scopus)

Abstract

The coupling of semiconductor field-effect devices (FED) together with chemical and biological recognition elements, like functional intelligent materials, biomolecules and living cells, represents an attractive platform for the creation of different (bio-)chemical sensors, multiparameter analysis systems and bio-chips. This paper summarises recent developments and current research activities in the field of (bio-)chemically modified FEDs, scaling down from capacitive EIS (electrolyte-insulator-semiconductor) sensors and LAPS (light-addressable Potentiometrie sensor) to ISFETs (ion-sensitive field-effect transistor) that have been realised in our laboratory. Selected examples of application of ISFETs for the detection of physical parameters in liquids are presented, too. With the aim of future development of nano-devices for the detection of single biomolecules, the possibility of a simple preparation of different selfaligned nano-structures by using conventional photolithography and pattern-size reduction technique has been experimentally demonstrated.

Original languageEnglish
Title of host publicationIntegrated Nanosensors
PublisherMaterials Research Society
Pages7-15
Number of pages9
ISBN (Print)9781604234084
DOIs
Publication statusPublished - 2006 Jan 1
Event2006 MRS Fall Meeting - Boston, MA, United States
Duration: 2006 Nov 272006 Nov 29

Publication series

NameMaterials Research Society Symposium Proceedings
Volume952
ISSN (Print)0272-9172

Other

Other2006 MRS Fall Meeting
CountryUnited States
CityBoston, MA
Period06/11/2706/11/29

ASJC Scopus subject areas

  • Materials Science(all)
  • Condensed Matter Physics
  • Mechanics of Materials
  • Mechanical Engineering

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