A self-calibration stitching method for pitch deviation evaluation of a long-range linear scale by using a fizeau interferometer

Xin Xiong, Yuki Shimizu, Hiraku Matsukuma, Wei Gao

Research output: Contribution to journalArticlepeer-review

Abstract

An interferometric self-calibration method for the evaluation of the pitch deviation of scale grating has been extended to evaluate the pitch deviation of the long-range type linear scale by utilizing the stitching interferometry technique. Following the previous work, in which the interferometric self-calibration method was proposed to assess the pitch deviation of the scale grating by combing the first-order diffracted beams from the grating, a stitching calibration method is proposed to enlarge the measurement range. Theoretical analysis is performed to realize the X-directional pitch deviation calibration of the long-range linear scale while reducing the second-order accumulation effect by canceling the influence of the reference flat error in the sub-apertures’ measurements. In this paper, the stitching interferometry theory is briefly reviewed, and theoretical equations of the X-directional pitch deviation stitching are derived for evaluation of the pitch deviation of the long-range linear scale. Followed by the simulation verification, some experiments with a linear scale of 105 mm length from a commercial interferential scanning-type optical encoder are conducted to verify the feasibility of the self-calibration stitching method for the calibration of the X-directional pitch deviation of the linear scale over its whole area.

Original languageEnglish
Article number7412
JournalSensors
Volume21
Issue number21
DOIs
Publication statusPublished - 2021 Nov 1

Keywords

  • Linear scale
  • Optical encoder
  • Pitch deviation
  • Self-calibration
  • Stitching interferometry

ASJC Scopus subject areas

  • Analytical Chemistry
  • Information Systems
  • Atomic and Molecular Physics, and Optics
  • Biochemistry
  • Instrumentation
  • Electrical and Electronic Engineering

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