TY - JOUR
T1 - A ring oscillator consisting of pentacene thin-film transistors with controlled threshold voltages
AU - Takahashi, Hajime
AU - Kitamura, Masatoshi
AU - Hattori, Yoshiaki
AU - Kimura, Yoshinari
N1 - Publisher Copyright:
© 2019 The Japan Society of Applied Physics.
PY - 2019
Y1 - 2019
N2 - Pentacene thin-film transistors (TFTs) with controlled threshold voltages have been applied to a ring oscillator consisting of enhancement/depletion inverters for evaluation of the dynamic characteristics. The threshold voltage control was demonstrated by using oxygen plasma treatment to the SiO2 gate dielectric prepared by rf sputtering. The surface roughness of the SiO2 gate dielectric depended on the sputtering condition. The use of flat SiO2 gate dielectrics contributed to the improvement of the field-effect mobilities in pentacene TFTs. As a result, the ring oscillator operated at supply voltages of 15-25 V. The oscillation frequency was consistent with the result of circuit simulation for the ring oscillator.
AB - Pentacene thin-film transistors (TFTs) with controlled threshold voltages have been applied to a ring oscillator consisting of enhancement/depletion inverters for evaluation of the dynamic characteristics. The threshold voltage control was demonstrated by using oxygen plasma treatment to the SiO2 gate dielectric prepared by rf sputtering. The surface roughness of the SiO2 gate dielectric depended on the sputtering condition. The use of flat SiO2 gate dielectrics contributed to the improvement of the field-effect mobilities in pentacene TFTs. As a result, the ring oscillator operated at supply voltages of 15-25 V. The oscillation frequency was consistent with the result of circuit simulation for the ring oscillator.
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U2 - 10.7567/1347-4065/ab01d3
DO - 10.7567/1347-4065/ab01d3
M3 - Article
AN - SCOPUS:85065207409
VL - 58
JO - Japanese Journal of Applied Physics, Part 1: Regular Papers & Short Notes
JF - Japanese Journal of Applied Physics, Part 1: Regular Papers & Short Notes
SN - 0021-4922
IS - SB
M1 - SBBJ04
ER -