A Reflection-Type Vapor Cell for Micro Atomic Clock

Hitoshi Nishino, Masaya Toda, Yoshiaki Kanamori, Yuichiro Yano, Masatoshi Kajita, Tetsuya Ido, Motoaki Hara, Takahito Ono

Research output: Chapter in Book/Report/Conference proceedingConference contribution

1 Citation (Scopus)

Abstract

This paper reports the design, fabrication and evaluation of a reflection-type Rb vapor cell with a Glass/Si/Glass structure for chip-scale micro atomic clocks. To miniaturize the cell and obtain a Rb resonance signal with a high sensitivity, long laser light traveling pass on the horizontal plane is required in the vapor cell. The horizontal Rb vapor cell with integrated mirrors are proposed and developed. A (100)-oriented Si wafer with cut off 9.74° toward [011] direction was used to make 45° mirrors by using anisotropic wet etching. Also, 90° mirrors were fabricated by Si deep RIE (Reactive Ion Etching) and H2 annealing. Absorption line of Rb was confirmed and CPT (Coherent Population Trapping) resonance was demonstrated in the fabricated devices.

Original languageEnglish
Title of host publication2019 IEEE 32nd International Conference on Micro Electro Mechanical Systems, MEMS 2019
PublisherInstitute of Electrical and Electronics Engineers Inc.
Pages915-918
Number of pages4
ISBN (Electronic)9781728116105
DOIs
Publication statusPublished - 2019 Jan
Event32nd IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2019 - Seoul, Korea, Republic of
Duration: 2019 Jan 272019 Jan 31

Publication series

NameProceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)
Volume2019-January
ISSN (Print)1084-6999

Conference

Conference32nd IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2019
Country/TerritoryKorea, Republic of
CitySeoul
Period19/1/2719/1/31

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Condensed Matter Physics
  • Mechanical Engineering
  • Electrical and Electronic Engineering

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