A Reflection Type Vapor Cell Based on Local Anodic Bonding of 45° Mirrors for Micro Atomic Clocks

Hitoshi Nishino, Masaya Toda, Yuichiro Yano, Masatoshi Kajita, Tetsuya Ido, Motoaki Hara, Takahito Ono

Research output: Chapter in Book/Report/Conference proceedingConference contribution

1 Citation (Scopus)

Abstract

This paper reports the design, fabrication and evaluation of a reflection-type micro Rb vapor cell fabricated by local anodic bonding of small 45° mirrors. The 45° mirrors with a Bragg reflector are fabricated by using dicing process. The vapor cells having a horizontal cavity with the 45° mirrors at the both ends are fabricated by anodic bonding process. Optical absorption of Rb and CPT (Coherent Population Trapping) resonance for atomic clock operation are evaluated.

Original languageEnglish
Title of host publication2019 20th International Conference on Solid-State Sensors, Actuators and Microsystems and Eurosensors XXXIII, TRANSDUCERS 2019 and EUROSENSORS XXXIII
PublisherInstitute of Electrical and Electronics Engineers Inc.
Pages1530-1532
Number of pages3
ISBN (Electronic)9781728120072
DOIs
Publication statusPublished - 2019 Jun
Event20th International Conference on Solid-State Sensors, Actuators and Microsystems and Eurosensors XXXIII, TRANSDUCERS 2019 and EUROSENSORS XXXIII - Berlin, Germany
Duration: 2019 Jun 232019 Jun 27

Publication series

Name2019 20th International Conference on Solid-State Sensors, Actuators and Microsystems and Eurosensors XXXIII, TRANSDUCERS 2019 and EUROSENSORS XXXIII

Conference

Conference20th International Conference on Solid-State Sensors, Actuators and Microsystems and Eurosensors XXXIII, TRANSDUCERS 2019 and EUROSENSORS XXXIII
Country/TerritoryGermany
CityBerlin
Period19/6/2319/6/27

Keywords

  • Atomic clock
  • anodic bonding
  • coherent population trapping
  • reflection mirrors
  • vapor cell

ASJC Scopus subject areas

  • Process Chemistry and Technology
  • Spectroscopy
  • Electrical and Electronic Engineering
  • Mechanical Engineering
  • Electronic, Optical and Magnetic Materials
  • Control and Optimization
  • Instrumentation

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