TY - GEN
T1 - A quasi-millimeter wave band phase shifter with MEMS shunt switches
AU - Watanabe, Takuto
AU - Yamazaki, Ryota
AU - Furutsuka, Takashi
AU - Tanaka, Shuji
AU - Suzuki, Kenichiro
PY - 2014/3/25
Y1 - 2014/3/25
N2 - As a key component of high-performance phased array antennas, a variable phase shifter using MEMS (microelectromechanical systems) switches have been studied. A monolithically-integrated 180° phase shifter was designed for quasi-millimeter wave band, and fabricated on a Si GCPW (grounded coplanar waveguide) substrate with ground vias filled with conductive paste. The Si GCPW substrate with dummy MEMS switches, i.e. short and open lines, showed the maximum insertion loss as small as 1.65 dB and a phase shift of 184.6° at 24 GHz. The 180° phase shifter with the integrated switches showed an almost identical phase shift of 184.2°.
AB - As a key component of high-performance phased array antennas, a variable phase shifter using MEMS (microelectromechanical systems) switches have been studied. A monolithically-integrated 180° phase shifter was designed for quasi-millimeter wave band, and fabricated on a Si GCPW (grounded coplanar waveguide) substrate with ground vias filled with conductive paste. The Si GCPW substrate with dummy MEMS switches, i.e. short and open lines, showed the maximum insertion loss as small as 1.65 dB and a phase shift of 184.6° at 24 GHz. The 180° phase shifter with the integrated switches showed an almost identical phase shift of 184.2°.
KW - Coplanar waveguides
KW - Microelectromechanical system devices
KW - Millimeter wave switches
KW - Phase shifters
KW - Phased array radar
UR - http://www.scopus.com/inward/record.url?scp=84949091370&partnerID=8YFLogxK
UR - http://www.scopus.com/inward/citedby.url?scp=84949091370&partnerID=8YFLogxK
M3 - Conference contribution
AN - SCOPUS:84949091370
T3 - 2014 Asia-Pacific Microwave Conference Proceedings, APMC 2014
SP - 64
EP - 66
BT - 2014 Asia-Pacific Microwave Conference Proceedings, APMC 2014
PB - Institute of Electrical and Electronics Engineers Inc.
T2 - 2014 Asia-Pacific Microwave Conference, APMC 2014
Y2 - 4 November 2014 through 7 November 2014
ER -