A quasi-millimeter wave band phase shifter with MEMS shunt switches

Takuto Watanabe; Ryota Yamazaki; Takashi Furutsuka; Shuji Tanaka; Kenichiro Suzuki

A quasi-millimeter wave band phase shifter with MEMS shunt switches

Takuto Watanabe, Ryota Yamazaki, Takashi Furutsuka, Shuji Tanaka, Kenichiro Suzuki

ENG - Robotics

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

1 Citation (Scopus)

Abstract

As a key component of high-performance phased array antennas, a variable phase shifter using MEMS (microelectromechanical systems) switches have been studied. A monolithically-integrated 180° phase shifter was designed for quasi-millimeter wave band, and fabricated on a Si GCPW (grounded coplanar waveguide) substrate with ground vias filled with conductive paste. The Si GCPW substrate with dummy MEMS switches, i.e. short and open lines, showed the maximum insertion loss as small as 1.65 dB and a phase shift of 184.6° at 24 GHz. The 180° phase shifter with the integrated switches showed an almost identical phase shift of 184.2°.

Original language	English
Title of host publication	2014 Asia-Pacific Microwave Conference Proceedings, APMC 2014
Publisher	Institute of Electrical and Electronics Engineers Inc.
Pages	64-66
Number of pages	3
ISBN (Electronic)	9784902339314
Publication status	Published - 2014 Mar 25
Event	2014 Asia-Pacific Microwave Conference, APMC 2014 - Sendai, Japan Duration: 2014 Nov 4 → 2014 Nov 7

Publication series

Name	2014 Asia-Pacific Microwave Conference Proceedings, APMC 2014

Other

Other	2014 Asia-Pacific Microwave Conference, APMC 2014
Country/Territory	Japan
City	Sendai
Period	14/11/4 → 14/11/7

Keywords

Coplanar waveguides
Microelectromechanical system devices
Millimeter wave switches
Phase shifters
Phased array radar

ASJC Scopus subject areas

Computer Networks and Communications
Hardware and Architecture
Electrical and Electronic Engineering

Cite this

A quasi-millimeter wave band phase shifter with MEMS shunt switches. / Watanabe, Takuto; Yamazaki, Ryota; Furutsuka, Takashi; Tanaka, Shuji; Suzuki, Kenichiro.

2014 Asia-Pacific Microwave Conference Proceedings, APMC 2014. Institute of Electrical and Electronics Engineers Inc., 2014. p. 64-66 7067950 (2014 Asia-Pacific Microwave Conference Proceedings, APMC 2014).

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

Watanabe, T, Yamazaki, R, Furutsuka, T, Tanaka, S & Suzuki, K 2014, A quasi-millimeter wave band phase shifter with MEMS shunt switches. in 2014 Asia-Pacific Microwave Conference Proceedings, APMC 2014., 7067950, 2014 Asia-Pacific Microwave Conference Proceedings, APMC 2014, Institute of Electrical and Electronics Engineers Inc., pp. 64-66, 2014 Asia-Pacific Microwave Conference, APMC 2014, Sendai, Japan, 14/11/4.

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title = "A quasi-millimeter wave band phase shifter with MEMS shunt switches",

abstract = "As a key component of high-performance phased array antennas, a variable phase shifter using MEMS (microelectromechanical systems) switches have been studied. A monolithically-integrated 180° phase shifter was designed for quasi-millimeter wave band, and fabricated on a Si GCPW (grounded coplanar waveguide) substrate with ground vias filled with conductive paste. The Si GCPW substrate with dummy MEMS switches, i.e. short and open lines, showed the maximum insertion loss as small as 1.65 dB and a phase shift of 184.6° at 24 GHz. The 180° phase shifter with the integrated switches showed an almost identical phase shift of 184.2°.",

keywords = "Coplanar waveguides, Microelectromechanical system devices, Millimeter wave switches, Phase shifters, Phased array radar",

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AU - Watanabe, Takuto

AU - Yamazaki, Ryota

AU - Furutsuka, Takashi

AU - Tanaka, Shuji

AU - Suzuki, Kenichiro

PY - 2014/3/25

Y1 - 2014/3/25

N2 - As a key component of high-performance phased array antennas, a variable phase shifter using MEMS (microelectromechanical systems) switches have been studied. A monolithically-integrated 180° phase shifter was designed for quasi-millimeter wave band, and fabricated on a Si GCPW (grounded coplanar waveguide) substrate with ground vias filled with conductive paste. The Si GCPW substrate with dummy MEMS switches, i.e. short and open lines, showed the maximum insertion loss as small as 1.65 dB and a phase shift of 184.6° at 24 GHz. The 180° phase shifter with the integrated switches showed an almost identical phase shift of 184.2°.

AB - As a key component of high-performance phased array antennas, a variable phase shifter using MEMS (microelectromechanical systems) switches have been studied. A monolithically-integrated 180° phase shifter was designed for quasi-millimeter wave band, and fabricated on a Si GCPW (grounded coplanar waveguide) substrate with ground vias filled with conductive paste. The Si GCPW substrate with dummy MEMS switches, i.e. short and open lines, showed the maximum insertion loss as small as 1.65 dB and a phase shift of 184.6° at 24 GHz. The 180° phase shifter with the integrated switches showed an almost identical phase shift of 184.2°.

KW - Coplanar waveguides

KW - Microelectromechanical system devices

KW - Millimeter wave switches

KW - Phase shifters

KW - Phased array radar

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T2 - 2014 Asia-Pacific Microwave Conference, APMC 2014

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A quasi-millimeter wave band phase shifter with MEMS shunt switches

Abstract

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Keywords

ASJC Scopus subject areas

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