A quasi-millimeter wave band phase shifter with MEMS shunt switches

Takuto Watanabe, Ryota Yamazaki, Takashi Furutsuka, Shuji Tanaka, Kenichiro Suzuki

Research output: Chapter in Book/Report/Conference proceedingConference contribution

1 Citation (Scopus)

Abstract

As a key component of high-performance phased array antennas, a variable phase shifter using MEMS (microelectromechanical systems) switches have been studied. A monolithically-integrated 180° phase shifter was designed for quasi-millimeter wave band, and fabricated on a Si GCPW (grounded coplanar waveguide) substrate with ground vias filled with conductive paste. The Si GCPW substrate with dummy MEMS switches, i.e. short and open lines, showed the maximum insertion loss as small as 1.65 dB and a phase shift of 184.6° at 24 GHz. The 180° phase shifter with the integrated switches showed an almost identical phase shift of 184.2°.

Original languageEnglish
Title of host publication2014 Asia-Pacific Microwave Conference Proceedings, APMC 2014
PublisherInstitute of Electrical and Electronics Engineers Inc.
Pages64-66
Number of pages3
ISBN (Electronic)9784902339314
Publication statusPublished - 2014 Mar 25
Event2014 Asia-Pacific Microwave Conference, APMC 2014 - Sendai, Japan
Duration: 2014 Nov 42014 Nov 7

Publication series

Name2014 Asia-Pacific Microwave Conference Proceedings, APMC 2014

Other

Other2014 Asia-Pacific Microwave Conference, APMC 2014
CountryJapan
CitySendai
Period14/11/414/11/7

Keywords

  • Coplanar waveguides
  • Microelectromechanical system devices
  • Millimeter wave switches
  • Phase shifters
  • Phased array radar

ASJC Scopus subject areas

  • Computer Networks and Communications
  • Hardware and Architecture
  • Electrical and Electronic Engineering

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