A probe-positioning method with two-dimensional calibration pattern for micro-multi-point probes

Wataru Yashiro, Ichiro Shiraki, Kazushi Miki

Research output: Contribution to journalArticlepeer-review

8 Citations (Scopus)

Abstract

A probe-positioning pattern for a multiprobe atomic force microscope (AFM) was fabricated using electron-beam lithography. The probe positioning method can be independently driven without an extra probe monitoring system; each AFM probe monitors its own position by reading the address information on the pattern. A similar addressing concept for determining x-axis and y-axis locations of a microscope probe relative to a probe tip locator was also proposed.

Original languageEnglish
Pages (from-to)2722-2725
Number of pages4
JournalReview of Scientific Instruments
Volume74
Issue number5
DOIs
Publication statusPublished - 2003 May
Externally publishedYes

ASJC Scopus subject areas

  • Instrumentation

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