Abstract
We have developed a new optical flying head integrating a solid immersion lens (SIL) and a flying slider for application to an ultra high-density storage system. We report a practical method of fabricating this head. The flying head has a stable flying attitude at the flying height of 50 nm.
Original language | English |
---|---|
Pages (from-to) | 268-276 |
Number of pages | 9 |
Journal | Proceedings of SPIE - The International Society for Optical Engineering |
Volume | 4342 |
DOIs | |
Publication status | Published - 2002 Jan 1 |
Event | Optical Data Storage 2001 - Santa Fe,NM, United States Duration: 2001 Apr 22 → 2001 Apr 25 |
Keywords
- Flying slider
- Near field recording
- Negative pressure cavity
- Solid immersion lens (SIL)
ASJC Scopus subject areas
- Electronic, Optical and Magnetic Materials
- Condensed Matter Physics
- Computer Science Applications
- Applied Mathematics
- Electrical and Electronic Engineering