A self-ordered hexagonal and cubic-like mesoporous silica film has been successfully fabricated from a Metal-Insulator-Semiconductor device applied to a Nitrogen oxides (NOx) gas sensor based on the surface photo voltage system. These self-ordered mesoporous silica films are synthesized by using a nonionic triblock copolymer surfactant as a template in spin coating. The sensing characteristics as a NOx gas sensor are dependent on both mesostructures and exposure gases.
ASJC Scopus subject areas
- Condensed Matter Physics
- Physical and Theoretical Chemistry
- Surfaces, Coatings and Films
- Materials Chemistry