Abstract
A self-ordered hexagonal and cubic-like mesoporous silica film has been successfully fabricated from a Metal-Insulator-Semiconductor device applied to a Nitrogen oxides (NOx) gas sensor based on the surface photo voltage system. These self-ordered mesoporous silica films are synthesized by using a nonionic triblock copolymer surfactant as a template in spin coating. The sensing characteristics as a NOx gas sensor are dependent on both mesostructures and exposure gases.
Original language | English |
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Pages (from-to) | 783-786 |
Number of pages | 4 |
Journal | Studies in Surface Science and Catalysis |
Volume | 146 |
DOIs | |
Publication status | Published - 2003 |
Externally published | Yes |
ASJC Scopus subject areas
- Catalysis
- Condensed Matter Physics
- Physical and Theoretical Chemistry
- Surfaces, Coatings and Films
- Materials Chemistry