A physics-based imaging model of scanning electron microscopes

Kousuke Kamada, Takayuki Okatani, Koichiro Deguchi

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

This paper discusses a physics-based imaging model of scanning electron microscopes (SEM). The purpose is to accurately examine the imaging process of a SEM, which has to be necessary to realize novel applications of the SEM images, such as 3D shape reconstruction from image brightness. Its brightness is determined by the total energy of the secondary electrons derived by the incidence of accelerated electron beam to a surface point and then captured by the SEM detector. There are several simple imaging models. But, they are pointed out that the actual brightness cannot be dealt with. We then develop a better imaging model that precisely describes the physical process of the emergence of the secondary electron, their reflections and detections.

Original languageEnglish
Title of host publicationProceedings of IAPR Conference on Machine Vision Applications, MVA 2007
Pages102-105
Number of pages4
Publication statusPublished - 2007 Dec 1
Event10th IAPR Conference on Machine Vision Applications, MVA 2007 - Tokyo, Japan
Duration: 2007 May 162007 May 18

Publication series

NameProceedings of IAPR Conference on Machine Vision Applications, MVA 2007

Other

Other10th IAPR Conference on Machine Vision Applications, MVA 2007
CountryJapan
CityTokyo
Period07/5/1607/5/18

ASJC Scopus subject areas

  • Computer Vision and Pattern Recognition

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  • Cite this

    Kamada, K., Okatani, T., & Deguchi, K. (2007). A physics-based imaging model of scanning electron microscopes. In Proceedings of IAPR Conference on Machine Vision Applications, MVA 2007 (pp. 102-105). (Proceedings of IAPR Conference on Machine Vision Applications, MVA 2007).