A Phase Retrieval Method for Noncrystalline Layers on Crystal Surfaces

Wataru Yashiro, Kazushi Sumitani, Yoshitaka Yoda, Toshio Takahashi

Research output: Contribution to journalArticlepeer-review

4 Citations (Scopus)

Abstract

A phase retrieval method for noncrystalline surface layers that involves intensity modulation of the specular reflection under the excitation of a Bragg reflection was applied to a Si(001) single crystal covered with a native oxide layer of a few nanometers thickness. The phases and moduli of the amplitudes of the scatterings from the native oxide layer were uniquely retrieved at three points on the specular truncation rod. The phases and moduli obtained experimentally were consistently explained by a model of a Si(001) single crystal covered with a uniform oxide layer with a rough surface.

Original languageEnglish
Pages (from-to)6658-6662
Number of pages5
JournalJapanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers
Volume42
Issue number10
DOIs
Publication statusPublished - 2003 Oct
Externally publishedYes

Keywords

  • Amorphous thin film
  • Phase problem
  • Surface structure
  • Thin film structure
  • X-ray diffraction

ASJC Scopus subject areas

  • Engineering(all)
  • Physics and Astronomy(all)

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