TY - GEN
T1 - A Novel three Degree-of-Freedom Resonator with High Stiffness Sensitivity Utilizing Mode Localization
AU - Chen, Jianlin
AU - Tsukamoto, Takashiro
AU - Tanaka, Shuji
N1 - Publisher Copyright:
© 2021 IEEE.
PY - 2021/1/25
Y1 - 2021/1/25
N2 - This paper reports a novel three degree of freedom (DoF) resonator whose mechanical system is the combination of a normal dual mass resonator (DMR) and an amplified dual mass resonator (ADMR). Stiffness perturbation between two outer masses causes mode coupling between DMR mode and ADMR modes which can be treated as anti-phase modes of DMR and ADMR, respectively. The amplitude ratio of two masses, which came from the mode localization, is highly sensitive to the stiffness perturbation. Mode localization in this novel design was validated both by the theoretical and the experimental studies. From the theoretical consideration, the sensitivity could be tuned by adjusting the stiffnesses. The measurement results showed the as-fabricated sensitivity was 209.6. The sensitivity could be enhanced to be 56679 by applying the DC bias of 39.3V to electrostatically soften the inner springs, which is consistent with the theoretical result.
AB - This paper reports a novel three degree of freedom (DoF) resonator whose mechanical system is the combination of a normal dual mass resonator (DMR) and an amplified dual mass resonator (ADMR). Stiffness perturbation between two outer masses causes mode coupling between DMR mode and ADMR modes which can be treated as anti-phase modes of DMR and ADMR, respectively. The amplitude ratio of two masses, which came from the mode localization, is highly sensitive to the stiffness perturbation. Mode localization in this novel design was validated both by the theoretical and the experimental studies. From the theoretical consideration, the sensitivity could be tuned by adjusting the stiffnesses. The measurement results showed the as-fabricated sensitivity was 209.6. The sensitivity could be enhanced to be 56679 by applying the DC bias of 39.3V to electrostatically soften the inner springs, which is consistent with the theoretical result.
KW - mechanical couple
KW - Mode localization
KW - triple mass resonator
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U2 - 10.1109/MEMS51782.2021.9375206
DO - 10.1109/MEMS51782.2021.9375206
M3 - Conference contribution
AN - SCOPUS:85103465618
T3 - Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)
SP - 810
EP - 813
BT - 34th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2021
PB - Institute of Electrical and Electronics Engineers Inc.
T2 - 34th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2021
Y2 - 25 January 2021 through 29 January 2021
ER -