A Novel three Degree-of-Freedom Resonator with High Stiffness Sensitivity Utilizing Mode Localization

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

This paper reports a novel three degree of freedom (DoF) resonator whose mechanical system is the combination of a normal dual mass resonator (DMR) and an amplified dual mass resonator (ADMR). Stiffness perturbation between two outer masses causes mode coupling between DMR mode and ADMR modes which can be treated as anti-phase modes of DMR and ADMR, respectively. The amplitude ratio of two masses, which came from the mode localization, is highly sensitive to the stiffness perturbation. Mode localization in this novel design was validated both by the theoretical and the experimental studies. From the theoretical consideration, the sensitivity could be tuned by adjusting the stiffnesses. The measurement results showed the as-fabricated sensitivity was 209.6. The sensitivity could be enhanced to be 56679 by applying the DC bias of 39.3V to electrostatically soften the inner springs, which is consistent with the theoretical result.

Original languageEnglish
Title of host publication34th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2021
PublisherInstitute of Electrical and Electronics Engineers Inc.
Pages810-813
Number of pages4
ISBN (Electronic)9781665419123
DOIs
Publication statusPublished - 2021 Jan 25
Event34th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2021 - Virtual, Gainesville, United States
Duration: 2021 Jan 252021 Jan 29

Publication series

NameProceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)
Volume2021-January
ISSN (Print)1084-6999

Conference

Conference34th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2021
CountryUnited States
CityVirtual, Gainesville
Period21/1/2521/1/29

Keywords

  • mechanical couple
  • Mode localization
  • triple mass resonator

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Condensed Matter Physics
  • Mechanical Engineering
  • Electrical and Electronic Engineering

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