A novel sensorless control of a two-axis planar motion stage for precision positioning

Song Yi Dian, Hang Dong, Wei Gao

Research output: Chapter in Book/Report/Conference proceedingConference contribution

1 Citation (Scopus)

Abstract

In this study, a novel sensorless control to yield sub-micron precision positioning performance and low cost has been introduced to a Sawyer motor-based two-axis planar motion stage. The experiment results have verified the effectiveness of the suggested strategy for the stage.

Original languageEnglish
Title of host publicationManufacturing Process Technology
Pages4121-4125
Number of pages5
DOIs
Publication statusPublished - 2011 Mar 16
Event2nd International Conference on Manufacturing Science and Engineering, ICMSE 2011 - Guilin, China
Duration: 2011 Apr 92011 Apr 11

Publication series

NameAdvanced Materials Research
Volume189-193
ISSN (Print)1022-6680

Other

Other2nd International Conference on Manufacturing Science and Engineering, ICMSE 2011
CountryChina
CityGuilin
Period11/4/911/4/11

Keywords

  • Planar motion stage
  • Precision positioning
  • Sensorless control
  • Sliding mode observer

ASJC Scopus subject areas

  • Engineering(all)

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  • Cite this

    Dian, S. Y., Dong, H., & Gao, W. (2011). A novel sensorless control of a two-axis planar motion stage for precision positioning. In Manufacturing Process Technology (pp. 4121-4125). (Advanced Materials Research; Vol. 189-193). https://doi.org/10.4028/www.scientific.net/AMR.189-193.4121