To improve the metrological characteristics of the measurement technique scanning probe microscopy by broadening its measuring range as well as increasing its high aspect ratio measuring capability, a new STM has been developed. A dual-stage servo instead of 3D PZT tube scanner is arranged such that for features within the range of the fast actuator, both long range and high speed. The raster scanning is achieved by two linear stages that driven by servo-motors. Each of the stage has a travel stroke of 25 mm, a maximum speed of 1.5 mm/s and a minimum incremental motion of 10 nm. A PZT actuator mounted onto the raster scanning stage serves as fast feedback servo for operation on constant current mode. Also in order to enable the STM to measure high aspect ratio micro structures, STM probe with high aspect ratio up to 450:1 has been developed and integrated into the new STM. Using this new STM system, a long range of 500 μm line scanning and a 300 μm× 300 μm 3D surface scanning has been successfully achieved. A trench with a depth of 2.8 μm has also been faithfully measured.