A novel scanning tunneling microscopy for long range and high aspect ratio measurement

Yuan Liu Chen, Bing Feng Ju

Research output: Chapter in Book/Report/Conference proceedingConference contribution

1 Citation (Scopus)

Abstract

To improve the metrological characteristics of the measurement technique scanning probe microscopy by broadening its measuring range as well as increasing its high aspect ratio measuring capability, a new STM has been developed. A dual-stage servo instead of 3D PZT tube scanner is arranged such that for features within the range of the fast actuator, both long range and high speed. The raster scanning is achieved by two linear stages that driven by servo-motors. Each of the stage has a travel stroke of 25 mm, a maximum speed of 1.5 mm/s and a minimum incremental motion of 10 nm. A PZT actuator mounted onto the raster scanning stage serves as fast feedback servo for operation on constant current mode. Also in order to enable the STM to measure high aspect ratio micro structures, STM probe with high aspect ratio up to 450:1 has been developed and integrated into the new STM. Using this new STM system, a long range of 500 μm line scanning and a 300 μm× 300 μm 3D surface scanning has been successfully achieved. A trench with a depth of 2.8 μm has also been faithfully measured.

Original languageEnglish
Title of host publication10th International Symposium on Measurement and Quality Control 2010, ISMQC 2010
Pages362-365
Number of pages4
Publication statusPublished - 2010 Dec 1
Event10th International Symposium on Measurement and Quality Control 2010, ISMQC 2010 - Osaka, Japan
Duration: 2010 Sep 52010 Sep 9

Publication series

Name10th International Symposium on Measurement and Quality Control 2010, ISMQC 2010

Other

Other10th International Symposium on Measurement and Quality Control 2010, ISMQC 2010
CountryJapan
CityOsaka
Period10/9/510/9/9

Keywords

  • High aspect ratio
  • Long range
  • Scanning tunneling microscopy

ASJC Scopus subject areas

  • Safety, Risk, Reliability and Quality

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