A Novel Quality Factor Trimming Method for Multi-Ring MEMS Resonators Based on Thermoelastic Dissipation

Hamza Abdelli; Takashiro Tsukamoto; Muhammad Khan; Shuji Tanaka

doi:10.1109/MEMS51670.2022.9699522

A Novel Quality Factor Trimming Method for Multi-Ring MEMS Resonators Based on Thermoelastic Dissipation

Hamza Abdelli, Takashiro Tsukamoto, Muhammad Khan, Shuji Tanaka

ENG - Robotics

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

Abstract

We report, for the first time, the experimental demonstration of quality factor (Q-factor) trimming based on thermoelastic dissipation (TED). The proposed method could control the heat path, eventually energy dissipation rate by TED. By the appropriate choice of the trimming location, it could tune the Q-factor of a mode, almost independent from the Q-factors of other modes as well as the resonant frequencies. A multiring resonator was designed and evaluated to demonstrate the Q-factor tuning of a n = 2 wine glass mode. The Q-factor difference could be trimmed as high as 19.43%, while the frequency difference changed was as small as 0.43%.

Original language	English
Title of host publication	35th IEEE International Conference on Micro Electro Mechanical Systems Conference, MEMS 2022
Publisher	IEEE Computer Society
Pages	766-769
Number of pages	4
ISBN (Electronic)	9781665409117
DOIs	https://doi.org/10.1109/MEMS51670.2022.9699522
Publication status	Published - 2022
Event	35th IEEE International Conference on Micro Electro Mechanical Systems Conference, MEMS 2022 - Tokyo, Japan Duration: 2022 Jan 9 → 2022 Jan 13

Publication series

Name	IEEE Symposium on Mass Storage Systems and Technologies
Volume	2022-January
ISSN (Print)	2160-1968

Conference

Conference	35th IEEE International Conference on Micro Electro Mechanical Systems Conference, MEMS 2022
Country/Territory	Japan
City	Tokyo
Period	22/1/9 → 22/1/13

Keywords

FM gyroscope
Focused ion beam
Multi-ring resonator
Q-factor trimming
Rate integrating gyroscope
TED

ASJC Scopus subject areas

Hardware and Architecture
Electrical and Electronic Engineering

Access to Document

10.1109/MEMS51670.2022.9699522

Cite this

Abdelli, H., Tsukamoto, T., Khan, M., & Tanaka, S. (2022). A Novel Quality Factor Trimming Method for Multi-Ring MEMS Resonators Based on Thermoelastic Dissipation. In 35th IEEE International Conference on Micro Electro Mechanical Systems Conference, MEMS 2022 (pp. 766-769). (IEEE Symposium on Mass Storage Systems and Technologies; Vol. 2022-January). IEEE Computer Society. https://doi.org/10.1109/MEMS51670.2022.9699522

A Novel Quality Factor Trimming Method for Multi-Ring MEMS Resonators Based on Thermoelastic Dissipation. / Abdelli, Hamza; Tsukamoto, Takashiro; Khan, Muhammad et al.

35th IEEE International Conference on Micro Electro Mechanical Systems Conference, MEMS 2022. IEEE Computer Society, 2022. p. 766-769 (IEEE Symposium on Mass Storage Systems and Technologies; Vol. 2022-January).

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

Abdelli, H, Tsukamoto, T, Khan, M & Tanaka, S 2022, A Novel Quality Factor Trimming Method for Multi-Ring MEMS Resonators Based on Thermoelastic Dissipation. in 35th IEEE International Conference on Micro Electro Mechanical Systems Conference, MEMS 2022. IEEE Symposium on Mass Storage Systems and Technologies, vol. 2022-January, IEEE Computer Society, pp. 766-769, 35th IEEE International Conference on Micro Electro Mechanical Systems Conference, MEMS 2022, Tokyo, Japan, 22/1/9. https://doi.org/10.1109/MEMS51670.2022.9699522

Abdelli H, Tsukamoto T, Khan M, Tanaka S. A Novel Quality Factor Trimming Method for Multi-Ring MEMS Resonators Based on Thermoelastic Dissipation. In 35th IEEE International Conference on Micro Electro Mechanical Systems Conference, MEMS 2022. IEEE Computer Society. 2022. p. 766-769. (IEEE Symposium on Mass Storage Systems and Technologies). doi: 10.1109/MEMS51670.2022.9699522

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title = "A Novel Quality Factor Trimming Method for Multi-Ring MEMS Resonators Based on Thermoelastic Dissipation",

abstract = "We report, for the first time, the experimental demonstration of quality factor (Q-factor) trimming based on thermoelastic dissipation (TED). The proposed method could control the heat path, eventually energy dissipation rate by TED. By the appropriate choice of the trimming location, it could tune the Q-factor of a mode, almost independent from the Q-factors of other modes as well as the resonant frequencies. A multiring resonator was designed and evaluated to demonstrate the Q-factor tuning of a n = 2 wine glass mode. The Q-factor difference could be trimmed as high as 19.43%, while the frequency difference changed was as small as 0.43%. ",

keywords = "FM gyroscope, Focused ion beam, Multi-ring resonator, Q-factor trimming, Rate integrating gyroscope, TED",

author = "Hamza Abdelli and Takashiro Tsukamoto and Muhammad Khan and Shuji Tanaka",

note = "Funding Information: This work is supported by a project commissioned by the New Energy and Industrial Technology Development Organization (NEDO). Publisher Copyright: {\textcopyright} 2022 IEEE.; 35th IEEE International Conference on Micro Electro Mechanical Systems Conference, MEMS 2022 ; Conference date: 09-01-2022 Through 13-01-2022",

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AB - We report, for the first time, the experimental demonstration of quality factor (Q-factor) trimming based on thermoelastic dissipation (TED). The proposed method could control the heat path, eventually energy dissipation rate by TED. By the appropriate choice of the trimming location, it could tune the Q-factor of a mode, almost independent from the Q-factors of other modes as well as the resonant frequencies. A multiring resonator was designed and evaluated to demonstrate the Q-factor tuning of a n = 2 wine glass mode. The Q-factor difference could be trimmed as high as 19.43%, while the frequency difference changed was as small as 0.43%.

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A Novel Quality Factor Trimming Method for Multi-Ring MEMS Resonators Based on Thermoelastic Dissipation

Abstract

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Keywords

ASJC Scopus subject areas

Access to Document

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