A novel process was developed to make micro-fine spherical high Nb containing TiAl alloyed powders in quantity. Ti-45Al-8.5Nb-0.2W-0.2B-0.02Y(at%) ingot prepared by vacuum induction melting was heat-treated for homogenization, and then machined with a crusher. The chippings were refined by fluidized bed jet milling, and subsequently spheroidized with radio frequency (RF) argon plasma. The effects of processing parameters on powder characteristics were studied. By fluidized bed jet milling, the particle size and distribution uniformity both decline with the rise of classifier frequency. Above 5800rpm, the number-average diameter is lower than 20μm with a bimodal particle size distribution. The powders consist of coarse plate-shaped particles and some finer flaky debris, and with the further rise of the frequency, the amount of debris gradually increases. The plasma-spheroidized powders are found to possess good sphericity and composition homogeneity with phase dominated by supersaturated α2-Ti3Al. The granulometric characteristics of the spherical powders strongly depend on those of the feed powders. For the jet milled powders below 5800rpm, due to the relatively lower size distribution uniformity, the fine particle fraction reduces after spheroidization, which causes an obvious improvement of distribution uniformity and the corresponding increase of number-average diameter.