A Novel Photoacoustic Microsensor for Enhanced Quality Factor Detection of Low Concentration Analytes

Imran Latif, Zhonglie An, Masaya Toda, Takahito Ono

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

This paper reports a novel microsensor for noninvasive photoacoustic biosensing in clinical diagnostic applications. The sensing platform utilizes the resonance mode of a vacuum-packaged Si microcantilever to detect and resolve the weak acoustic waves generated by the photoexcitation of the test analytes. The hermetic packaging not only overcomes the viscous degradation of acoustic signals but also yields ∼10-folds improvement in the limit of detectable pressure waves that is proportional to the square root of the quality factor. This approach allows the tuning of optical excitation frequencies close to the resonance mode of the microcantilever resulting in higher SNR compared to piezoelectric detection. Microsensor demonstrates the ability to resolve small variations of sample concentrations complementing the traditional analytical methods. The results show a high-resolution sensitivity of ∼5 ppm of the studied samples. This approach is the first attempt to exploit the benefits of resonance characteristics of a microcantilever with an enhanced quality factor for photoacoustic detection.

Original languageEnglish
Title of host publication2019 20th International Conference on Solid-State Sensors, Actuators and Microsystems and Eurosensors XXXIII, TRANSDUCERS 2019 and EUROSENSORS XXXIII
PublisherInstitute of Electrical and Electronics Engineers Inc.
Pages2065-2067
Number of pages3
ISBN (Electronic)9781728120072
DOIs
Publication statusPublished - 2019 Jun
Event20th International Conference on Solid-State Sensors, Actuators and Microsystems and Eurosensors XXXIII, TRANSDUCERS 2019 and EUROSENSORS XXXIII - Berlin, Germany
Duration: 2019 Jun 232019 Jun 27

Publication series

Name2019 20th International Conference on Solid-State Sensors, Actuators and Microsystems and Eurosensors XXXIII, TRANSDUCERS 2019 and EUROSENSORS XXXIII

Conference

Conference20th International Conference on Solid-State Sensors, Actuators and Microsystems and Eurosensors XXXIII, TRANSDUCERS 2019 and EUROSENSORS XXXIII
CountryGermany
CityBerlin
Period19/6/2319/6/27

Keywords

  • Biosensing
  • Noninvasive
  • Photoacoustic
  • Resonator
  • Vacuum packaging

ASJC Scopus subject areas

  • Process Chemistry and Technology
  • Spectroscopy
  • Electrical and Electronic Engineering
  • Mechanical Engineering
  • Electronic, Optical and Magnetic Materials
  • Control and Optimization
  • Instrumentation

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