A novel micro-injector using Surface Acoustic Wave

Joonhyung Bae, Masato Sato, Hiroki Kuwano

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

This paper describes the fabrication and evaluation of a novel micro-injector using Surface Acoustic Wave. It was confirmed that Dyed water was successfully injected into the air with the help of Surface Acoustic Wave (SAW), which was generated by Aluminum Inter-digital Transducer (IDT) on the AT-cut quartz substrate. In our knowledge, this kind of micro-injector using SAW is considered as the first device for fluidic injection.

Original languageEnglish
Title of host publicationTRANSDUCERS '05 - 13th International Conference on Solid-State Sensors and Actuators and Microsystems - Digest of Technical Papers
Pages1545-1548
Number of pages4
Publication statusPublished - 2005 Nov 9
Event13th International Conference on Solid-State Sensors and Actuators and Microsystems, TRANSDUCERS '05 - Seoul, Korea, Republic of
Duration: 2005 Jun 52005 Jun 9

Publication series

NameDigest of Technical Papers - International Conference on Solid State Sensors and Actuators and Microsystems, TRANSDUCERS '05
Volume2

Other

Other13th International Conference on Solid-State Sensors and Actuators and Microsystems, TRANSDUCERS '05
CountryKorea, Republic of
CitySeoul
Period05/6/505/6/9

Keywords

  • Micro Actuator
  • Micro Fluidics
  • Micro-injector
  • Quartz
  • Surface Acoustic Wave

ASJC Scopus subject areas

  • Engineering(all)

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  • Cite this

    Bae, J., Sato, M., & Kuwano, H. (2005). A novel micro-injector using Surface Acoustic Wave. In TRANSDUCERS '05 - 13th International Conference on Solid-State Sensors and Actuators and Microsystems - Digest of Technical Papers (pp. 1545-1548). [3E4.62] (Digest of Technical Papers - International Conference on Solid State Sensors and Actuators and Microsystems, TRANSDUCERS '05; Vol. 2).