A novel linbo3 surface acoustic wave pump onto micro channel wall

Takuya Sano, Masato Sato, Hiroki Kuwano, Sumito Nagasawa

Research output: Chapter in Book/Report/Conference proceedingConference contribution

1 Citation (Scopus)

Abstract

This paper describes a novel surface acoustic wave (SAW) micro fluidic pump fabricated on a micro channel wall made of LiNbO3 to reduce fluid friction. The micro-fluidic pump and micro channel were designed, fabricated and integrated as a micro-fluidic system for liquid mixing and reaction. We successfully demonstrated controlled flow rate by varying the input voltage as well as controlled ejection of fluid.

Original languageEnglish
Title of host publicationProceedings of the 11th International Conference on Miniaturized Systems for Chemistry and Life Sciences, uTAS 2007
EditorsJean-Louis Viovy, Patrick Tabeling, Stephanie Descroix, Laurent Malaquin
PublisherChemical and Biological Microsystems Society
Pages958-960
Number of pages3
ISBN (Electronic)9780979806407
Publication statusPublished - 2007
Event11th International Conference on Miniaturized Systems for Chemistry and Life Sciences, uTAS 2007 - Paris, France
Duration: 2007 Oct 72007 Oct 11

Publication series

NameProceedings of the 11th International Conference on Miniaturized Systems for Chemistry and Life Sciences, uTAS 2007

Conference

Conference11th International Conference on Miniaturized Systems for Chemistry and Life Sciences, uTAS 2007
CountryFrance
CityParis
Period07/10/707/10/11

Keywords

  • MEMS
  • Micro Fluidics
  • Pump
  • Surface Acoustic Wave

ASJC Scopus subject areas

  • Chemical Engineering (miscellaneous)
  • Bioengineering

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