A novel analysis of oxide breakdown based on dynamic observation using ultra-high speed video capturing up to 10,000,000 frames per second

Rihito Kuroda; Fan Shao; Daiki Kimoto; Kiichi Furukawa; Hidetake Sugo; Tohru Takeda; Ken Miyauchi; Yasuhisa Tochigi; Akinobu Teramoto; Shigetoshi Sugawa

doi:10.1109/IRPS.2014.6860637

A novel analysis of oxide breakdown based on dynamic observation using ultra-high speed video capturing up to 10,000,000 frames per second

Rihito Kuroda, Fan Shao, Daiki Kimoto, Kiichi Furukawa, Hidetake Sugo, Tohru Takeda, Ken Miyauchi, Yasuhisa Tochigi, Akinobu Teramoto, Shigetoshi Sugawa

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

3 Citations (Scopus)

Abstract

Dynamic visualization results of 100 nm-thick oxide breakdown are demonstrated in this work realized by the ultra-high speed video capturing with a frame rate of up to 10M frame-per-second. The correlation of the time-dependent-dielectric-breakdown failure mode and light emission mode are confirmed.

Original language	English
Title of host publication	2014 IEEE International Reliability Physics Symposium, IRPS 2014
Publisher	Institute of Electrical and Electronics Engineers Inc.
Pages	3F.3.1-3F.3.4
ISBN (Print)	9781479933167
DOIs	https://doi.org/10.1109/IRPS.2014.6860637
Publication status	Published - 2014
Event	52nd IEEE International Reliability Physics Symposium, IRPS 2014 - Waikoloa, HI, United States Duration: 2014 Jun 1 → 2014 Jun 5

Publication series

Name	IEEE International Reliability Physics Symposium Proceedings
ISSN (Print)	1541-7026

Other

Other	52nd IEEE International Reliability Physics Symposium, IRPS 2014
Country/Territory	United States
City	Waikoloa, HI
Period	14/6/1 → 14/6/5

Keywords

TDDB
high speed video camera
oxide breakdown

ASJC Scopus subject areas

Engineering(all)

Access to Document

10.1109/IRPS.2014.6860637

Cite this

Kuroda, R., Shao, F., Kimoto, D., Furukawa, K., Sugo, H., Takeda, T., Miyauchi, K., Tochigi, Y., Teramoto, A., & Sugawa, S. (2014). A novel analysis of oxide breakdown based on dynamic observation using ultra-high speed video capturing up to 10,000,000 frames per second. In 2014 IEEE International Reliability Physics Symposium, IRPS 2014 (pp. 3F.3.1-3F.3.4). [6860637] (IEEE International Reliability Physics Symposium Proceedings). Institute of Electrical and Electronics Engineers Inc.. https://doi.org/10.1109/IRPS.2014.6860637

A novel analysis of oxide breakdown based on dynamic observation using ultra-high speed video capturing up to 10,000,000 frames per second. / Kuroda, Rihito; Shao, Fan; Kimoto, Daiki; Furukawa, Kiichi; Sugo, Hidetake; Takeda, Tohru; Miyauchi, Ken; Tochigi, Yasuhisa; Teramoto, Akinobu; Sugawa, Shigetoshi.

2014 IEEE International Reliability Physics Symposium, IRPS 2014. Institute of Electrical and Electronics Engineers Inc., 2014. p. 3F.3.1-3F.3.4 6860637 (IEEE International Reliability Physics Symposium Proceedings).

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

Kuroda, R, Shao, F, Kimoto, D, Furukawa, K, Sugo, H, Takeda, T, Miyauchi, K, Tochigi, Y, Teramoto, A & Sugawa, S 2014, A novel analysis of oxide breakdown based on dynamic observation using ultra-high speed video capturing up to 10,000,000 frames per second. in 2014 IEEE International Reliability Physics Symposium, IRPS 2014., 6860637, IEEE International Reliability Physics Symposium Proceedings, Institute of Electrical and Electronics Engineers Inc., pp. 3F.3.1-3F.3.4, 52nd IEEE International Reliability Physics Symposium, IRPS 2014, Waikoloa, HI, United States, 14/6/1. https://doi.org/10.1109/IRPS.2014.6860637

Kuroda R, Shao F, Kimoto D, Furukawa K, Sugo H, Takeda T et al. A novel analysis of oxide breakdown based on dynamic observation using ultra-high speed video capturing up to 10,000,000 frames per second. In 2014 IEEE International Reliability Physics Symposium, IRPS 2014. Institute of Electrical and Electronics Engineers Inc. 2014. p. 3F.3.1-3F.3.4. 6860637. (IEEE International Reliability Physics Symposium Proceedings). https://doi.org/10.1109/IRPS.2014.6860637

Kuroda, Rihito ; Shao, Fan ; Kimoto, Daiki ; Furukawa, Kiichi ; Sugo, Hidetake ; Takeda, Tohru ; Miyauchi, Ken ; Tochigi, Yasuhisa ; Teramoto, Akinobu ; Sugawa, Shigetoshi. / A novel analysis of oxide breakdown based on dynamic observation using ultra-high speed video capturing up to 10,000,000 frames per second. 2014 IEEE International Reliability Physics Symposium, IRPS 2014. Institute of Electrical and Electronics Engineers Inc., 2014. pp. 3F.3.1-3F.3.4 (IEEE International Reliability Physics Symposium Proceedings).

@inproceedings{071881f92e57437bab2c9c68c4dc3a4b,

title = "A novel analysis of oxide breakdown based on dynamic observation using ultra-high speed video capturing up to 10,000,000 frames per second",

abstract = "Dynamic visualization results of 100 nm-thick oxide breakdown are demonstrated in this work realized by the ultra-high speed video capturing with a frame rate of up to 10M frame-per-second. The correlation of the time-dependent-dielectric-breakdown failure mode and light emission mode are confirmed.",

keywords = "TDDB, high speed video camera, oxide breakdown",

author = "Rihito Kuroda and Fan Shao and Daiki Kimoto and Kiichi Furukawa and Hidetake Sugo and Tohru Takeda and Ken Miyauchi and Yasuhisa Tochigi and Akinobu Teramoto and Shigetoshi Sugawa",

year = "2014",

doi = "10.1109/IRPS.2014.6860637",

language = "English",

isbn = "9781479933167",

series = "IEEE International Reliability Physics Symposium Proceedings",

publisher = "Institute of Electrical and Electronics Engineers Inc.",

pages = "3F.3.1--3F.3.4",

booktitle = "2014 IEEE International Reliability Physics Symposium, IRPS 2014",

note = "52nd IEEE International Reliability Physics Symposium, IRPS 2014 ; Conference date: 01-06-2014 Through 05-06-2014",

}

TY - GEN

T1 - A novel analysis of oxide breakdown based on dynamic observation using ultra-high speed video capturing up to 10,000,000 frames per second

AU - Kuroda, Rihito

AU - Shao, Fan

AU - Kimoto, Daiki

AU - Furukawa, Kiichi

AU - Sugo, Hidetake

AU - Takeda, Tohru

AU - Miyauchi, Ken

AU - Tochigi, Yasuhisa

AU - Teramoto, Akinobu

AU - Sugawa, Shigetoshi

PY - 2014

Y1 - 2014

N2 - Dynamic visualization results of 100 nm-thick oxide breakdown are demonstrated in this work realized by the ultra-high speed video capturing with a frame rate of up to 10M frame-per-second. The correlation of the time-dependent-dielectric-breakdown failure mode and light emission mode are confirmed.

AB - Dynamic visualization results of 100 nm-thick oxide breakdown are demonstrated in this work realized by the ultra-high speed video capturing with a frame rate of up to 10M frame-per-second. The correlation of the time-dependent-dielectric-breakdown failure mode and light emission mode are confirmed.

KW - TDDB

KW - high speed video camera

KW - oxide breakdown

UR - http://www.scopus.com/inward/record.url?scp=84905652252&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=84905652252&partnerID=8YFLogxK

U2 - 10.1109/IRPS.2014.6860637

DO - 10.1109/IRPS.2014.6860637

M3 - Conference contribution

AN - SCOPUS:84905652252

SN - 9781479933167

T3 - IEEE International Reliability Physics Symposium Proceedings

SP - 3F.3.1-3F.3.4

BT - 2014 IEEE International Reliability Physics Symposium, IRPS 2014

PB - Institute of Electrical and Electronics Engineers Inc.

T2 - 52nd IEEE International Reliability Physics Symposium, IRPS 2014

Y2 - 1 June 2014 through 5 June 2014

ER -

A novel analysis of oxide breakdown based on dynamic observation using ultra-high speed video capturing up to 10,000,000 frames per second

Abstract

Publication series

Other

Keywords

ASJC Scopus subject areas

Access to Document

Other files and links

Fingerprint

Cite this