@inproceedings{071881f92e57437bab2c9c68c4dc3a4b,
title = "A novel analysis of oxide breakdown based on dynamic observation using ultra-high speed video capturing up to 10,000,000 frames per second",
abstract = "Dynamic visualization results of 100 nm-thick oxide breakdown are demonstrated in this work realized by the ultra-high speed video capturing with a frame rate of up to 10M frame-per-second. The correlation of the time-dependent-dielectric-breakdown failure mode and light emission mode are confirmed.",
keywords = "TDDB, high speed video camera, oxide breakdown",
author = "Rihito Kuroda and Fan Shao and Daiki Kimoto and Kiichi Furukawa and Hidetake Sugo and Tohru Takeda and Ken Miyauchi and Yasuhisa Tochigi and Akinobu Teramoto and Shigetoshi Sugawa",
year = "2014",
month = jan,
day = "1",
doi = "10.1109/IRPS.2014.6860637",
language = "English",
isbn = "9781479933167",
series = "IEEE International Reliability Physics Symposium Proceedings",
publisher = "Institute of Electrical and Electronics Engineers Inc.",
pages = "3F.3.1--3F.3.4",
booktitle = "2014 IEEE International Reliability Physics Symposium, IRPS 2014",
note = "52nd IEEE International Reliability Physics Symposium, IRPS 2014 ; Conference date: 01-06-2014 Through 05-06-2014",
}