A novel analysis of oxide breakdown based on dynamic observation using ultra-high speed video capturing up to 10,000,000 frames per second

Rihito Kuroda, Fan Shao, Daiki Kimoto, Kiichi Furukawa, Hidetake Sugo, Tohru Takeda, Ken Miyauchi, Yasuhisa Tochigi, Akinobu Teramoto, Shigetoshi Sugawa

Research output: Chapter in Book/Report/Conference proceedingConference contribution

2 Citations (Scopus)

Abstract

Dynamic visualization results of 100 nm-thick oxide breakdown are demonstrated in this work realized by the ultra-high speed video capturing with a frame rate of up to 10M frame-per-second. The correlation of the time-dependent-dielectric-breakdown failure mode and light emission mode are confirmed.

Original languageEnglish
Title of host publication2014 IEEE International Reliability Physics Symposium, IRPS 2014
PublisherInstitute of Electrical and Electronics Engineers Inc.
Pages3F.3.1-3F.3.4
ISBN (Print)9781479933167
DOIs
Publication statusPublished - 2014 Jan 1
Event52nd IEEE International Reliability Physics Symposium, IRPS 2014 - Waikoloa, HI, United States
Duration: 2014 Jun 12014 Jun 5

Publication series

NameIEEE International Reliability Physics Symposium Proceedings
ISSN (Print)1541-7026

Other

Other52nd IEEE International Reliability Physics Symposium, IRPS 2014
CountryUnited States
CityWaikoloa, HI
Period14/6/114/6/5

Keywords

  • TDDB
  • high speed video camera
  • oxide breakdown

ASJC Scopus subject areas

  • Engineering(all)

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