A novel actuation mechanism based on ferromagnetic SMA thin films

M. Kohl, D. Brugger, M. Ohtsuka, T. Takagi

Research output: Chapter in Book/Report/Conference proceedingConference contribution

1 Citation (Scopus)

Abstract

A novel actuation mechanism is presented, which makes use of the antagonism of intrinsic magnetic and shape recovery forces acting on a ferromagnetic shape memory alloy (SMA) microactuator in a magnetic field. This mechanism is associated with large actuation and small biasing forces in each actuation direction resulting in a large stroke. Since no external biasing elements are required, extremely compact designs are possible. As a demonstrator, an optical microscanner of 9×3×5 mm3 size is presented showing large scanning angles up to 75 deg in off-resonance mode. The scanning performance keeps frequency-independent below a critical frequency, which is determined by heat-transfer times.

Original languageEnglish
Title of host publicationTRANSDUCERS 2003 - 12th International Conference on Solid-State Sensors, Actuators and Microsystems, Digest of Technical Papers
PublisherInstitute of Electrical and Electronics Engineers Inc.
Pages1011-1014
Number of pages4
ISBN (Electronic)0780377311, 9780780377318
DOIs
Publication statusPublished - 2003
Event12th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS 2003 - Digest of Technical Papers - Boston, United States
Duration: 2003 Jun 82003 Jun 12

Publication series

NameTRANSDUCERS 2003 - 12th International Conference on Solid-State Sensors, Actuators and Microsystems, Digest of Technical Papers
Volume2

Other

Other12th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS 2003 - Digest of Technical Papers
CountryUnited States
CityBoston
Period03/6/803/6/12

Keywords

  • Frequency
  • Magnetic fields
  • Magnetic materials
  • Optical films
  • Optical scattering
  • Shape memory alloys
  • Sputtering
  • Temperature sensors
  • Transducers
  • Transistors

ASJC Scopus subject areas

  • Electrical and Electronic Engineering

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