A new method to characterize dopant profiles in NMOSFETs using conventional transmission electron microscopy

Kazuo Kawamura, Kazuto Ikeda, Masami Terauchi

    Research output: Contribution to journalArticlepeer-review

    Fingerprint

    Dive into the research topics of 'A new method to characterize dopant profiles in NMOSFETs using conventional transmission electron microscopy'. Together they form a unique fingerprint.

    Engineering & Materials Science

    Physics & Astronomy

    Chemical Compounds