A new method of position detection using an optical scanning angle sensor

Satoshi Kiyono, Wei Gao, Masaya Kanai, Tadashi Hoshino, Yuki Shimizu

Research output: Contribution to journalArticle

1 Citation (Scopus)

Abstract

A new position detecting method, which uses a 2-D angle grid and a 2-D angle sensor, is proposed. The angle grid has a 2-D sinusoidal angular pattern on the surface. The relative displacements between the angle grid and the angle sensor in the X- and Y-directtons can be detected from the output of the angle sensor. Because of the angle independency in the X- and Y- directions, it is possible to detect the X- and Y-directional positions from the 2-D angle sensor outputs. Furthermore, use of an optical scanning angle sensor, which scans a beam spot on the angle grid, can reduce the effect of the form error of the angle grid. Rolling and pitching can also be detected by using this method. In this paper, a scanning 2-D angle sensor is designed and manufactured. Experimental results of position detection are reported.

Original languageEnglish
Pages (from-to)493-497
Number of pages5
JournalSeimitsu Kogaku Kaishi/Journal of the Japan Society for Precision Engineering
Volume67
Issue number3
DOIs
Publication statusPublished - 2001 Jan 1
Externally publishedYes

Keywords

  • Measurement
  • Optical angle sensor
  • Pitching
  • Position detection
  • Rolling
  • Scanning

ASJC Scopus subject areas

  • Mechanical Engineering

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