A new method for preparing plan-view TEM specimen of multilayered films using focused ion beam

Takeharu Kato, Takemi Muroga, Yasuhiro Iijima, Takashi Saitoh, Yutaka Yamada, Teruo Izumi, Yuh Shiohara, Tsukasa Hirayama, Yuichi Ikuhara

    Research output: Contribution to journalArticlepeer-review

    5 Citations (Scopus)

    Abstract

    A new method is proposed for preparing plan-view specimens of a CeO 2/ Gd2Zr2O7 multilayer on a metal substrate using focused ion beam milling. In the plan-view specimen, a membrane from the surface region of the CeO2 to the Gd2Zr 2O7 layer was thinned to electron transparence so that the entire span of the multilayer can be observed in a single sample. The in-plane alignments of the CeO2 layer and the Gd2Zr 2O7 layer were analysed using selected-area diffraction patterns (SADPs). The boundaries between the CeO2 grains were also examined using SADPs.

    Original languageEnglish
    Pages (from-to)501-504
    Number of pages4
    JournalJournal of Electron Microscopy
    Volume53
    Issue number5
    DOIs
    Publication statusPublished - 2004

    Keywords

    • Focused ion beam
    • IBAD-GdZrO
    • In-plane alignment
    • Multilayer
    • PLD-CeO
    • Plan-view observation

    ASJC Scopus subject areas

    • Instrumentation

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