A new method for fabrication nano-porous aluminum grating array

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12 Citations (Scopus)

Abstract

The fabrication technique of highly ordered anodic porous alumina membrane by anodization of Al and the obtained membrane as a mask to the fabrication of 100 run period antireflection grating hole are described. The two-step anodizing process improves the quality of the nanohole because the periodic seeds are generated by the first anodization. Antireflection grating structures are fabricated by using ordered anodic porous alumina mask and etched by SF 6 fast atom beam on silicon wafer. The reflectivity of the antireflection grating structures is measured and compared with that of the calculated value and the polished silicon surface.

Original languageEnglish
Pages (from-to)272-274
Number of pages3
JournalMicrosystem Technologies
Volume10
Issue number4
DOIs
Publication statusPublished - 2004 May 1

Keywords

  • Anodic porous alumina
  • Fast atom beam etching
  • Mask

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Condensed Matter Physics
  • Hardware and Architecture
  • Electrical and Electronic Engineering

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