A new grating X-ray spectrometer for 2-4 keV enabling a separate observation of In-Lβ and Sn-Lα emissions of indium tin oxide

Masami Terauchi, Hideyuki Takahashi, Nobuo Handa, Takanori Murano, Masato Koike, Tetsuya Kawachi, Takashi Imazono, Noboru Hasegawa, Masaru Koeda, Tetsuya Nagano, Hiroyuki Sasai, Yuki Oue, Zeno Yonezawa, Satoshi Kuramoto

Research output: Contribution to journalArticlepeer-review

11 Citations (Scopus)

Abstract

A new multilayer-coated varied line-spaced grating, JS4000, was fabricated and tested for extending the upper limit of a grating X-ray spectrometer for electron microscopy. This grating was designed for 2-3.8 keV at a grazing incidence angle of 1.35°. It was revealed that this new multilayer structure enables us to take soft-X-ray emission spectra continuously from 1.5 to 4.3 keV at the same optical setting. The full-width at half maximum of Te-L α1,2 (3.8 keV) emission peak was 27 eV. This spectrometer was applied to indium tin oxide particles and clearly resolved Sn-L α (3444 eV) and In-Lβ1 (3487 eV) peaks, which could not be resolved by a widely used energy-dispersive X-ray spectrometer.

Original languageEnglish
Pages (from-to)391-395
Number of pages5
JournalJournal of Electron Microscopy
Volume62
Issue number3
DOIs
Publication statusPublished - 2013 Jun

Keywords

  • indium tin oxide
  • multilayer coated grating
  • soft-X-ray emission spectroscopy
  • wavelength-dispersive spectroscopy

ASJC Scopus subject areas

  • Instrumentation

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