A new air cleaning and cooling instrument using oblique honeycomb

S. Minobe; I. Terada; Y. Motoyoshi; H. Hanaoka; Y. Shirai; T. Ohmi

doi:10.1109/ISSM.2006.4493124

A new air cleaning and cooling instrument using oblique honeycomb

S. Minobe, I. Terada, Y. Motoyoshi, H. Hanaoka, Y. Shirai, T. Ohmi

New Industry Creation Hatchery Center (NICHe)

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

Abstract

A new instrument with unified fonctions of washing and cooling for the intake air to clean rooms was studied. Its structure is based on oblique honeycombs made of high purity alumina as contact media of air to water. The alumina medium releases less contaminant to pure water than the conventional. The instrument showed high efficiencies in air cooling as well as removal of inorganic chemicals in the air. These resulted in the shortening of their lengths, reducing the amount of recycling water and consequently lowering the pressure loss upon the air treatment. The new instrument can provide very clean environments with low operation costs.

Original language	English
Title of host publication	ISSM 2006 Conference Proceedings - Fifteenth International Symposium on Semiconductor Manufacturing
Pages	417-420
Number of pages	4
DOIs	https://doi.org/10.1109/ISSM.2006.4493124
Publication status	Published - 2006 Dec 1
Event	ISSM 2006 - 15th International Symposium on Semiconductor Manufacturing - Tokyo, Japan Duration: 2007 Sept 25 → 2007 Sept 27

Publication series

Name	IEEE International Symposium on Semiconductor Manufacturing Conference Proceedings
ISSN (Print)	1523-553X

Other

Other	ISSM 2006 - 15th International Symposium on Semiconductor Manufacturing
Country/Territory	Japan
City	Tokyo
Period	07/9/25 → 07/9/27

ASJC Scopus subject areas

Electronic, Optical and Magnetic Materials
Engineering(all)
Industrial and Manufacturing Engineering
Electrical and Electronic Engineering

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10.1109/ISSM.2006.4493124

Cite this

Minobe, S., Terada, I., Motoyoshi, Y., Hanaoka, H., Shirai, Y., & Ohmi, T. (2006). A new air cleaning and cooling instrument using oblique honeycomb. In ISSM 2006 Conference Proceedings - Fifteenth International Symposium on Semiconductor Manufacturing (pp. 417-420). [4493124] (IEEE International Symposium on Semiconductor Manufacturing Conference Proceedings). https://doi.org/10.1109/ISSM.2006.4493124

A new air cleaning and cooling instrument using oblique honeycomb. / Minobe, S.; Terada, I.; Motoyoshi, Y. et al.

ISSM 2006 Conference Proceedings - Fifteenth International Symposium on Semiconductor Manufacturing. 2006. p. 417-420 4493124 (IEEE International Symposium on Semiconductor Manufacturing Conference Proceedings).

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

Minobe, S, Terada, I, Motoyoshi, Y, Hanaoka, H, Shirai, Y & Ohmi, T 2006, A new air cleaning and cooling instrument using oblique honeycomb. in ISSM 2006 Conference Proceedings - Fifteenth International Symposium on Semiconductor Manufacturing., 4493124, IEEE International Symposium on Semiconductor Manufacturing Conference Proceedings, pp. 417-420, ISSM 2006 - 15th International Symposium on Semiconductor Manufacturing, Tokyo, Japan, 07/9/25. https://doi.org/10.1109/ISSM.2006.4493124

Minobe S, Terada I, Motoyoshi Y, Hanaoka H, Shirai Y, Ohmi T. A new air cleaning and cooling instrument using oblique honeycomb. In ISSM 2006 Conference Proceedings - Fifteenth International Symposium on Semiconductor Manufacturing. 2006. p. 417-420. 4493124. (IEEE International Symposium on Semiconductor Manufacturing Conference Proceedings). doi: 10.1109/ISSM.2006.4493124

@inproceedings{7206b198f1b34afe915167e09323a05d,

title = "A new air cleaning and cooling instrument using oblique honeycomb",

abstract = "A new instrument with unified fonctions of washing and cooling for the intake air to clean rooms was studied. Its structure is based on oblique honeycombs made of high purity alumina as contact media of air to water. The alumina medium releases less contaminant to pure water than the conventional. The instrument showed high efficiencies in air cooling as well as removal of inorganic chemicals in the air. These resulted in the shortening of their lengths, reducing the amount of recycling water and consequently lowering the pressure loss upon the air treatment. The new instrument can provide very clean environments with low operation costs.",

author = "S. Minobe and I. Terada and Y. Motoyoshi and H. Hanaoka and Y. Shirai and T. Ohmi",

year = "2006",

month = dec,

day = "1",

doi = "10.1109/ISSM.2006.4493124",

language = "English",

isbn = "9784990413804",

series = "IEEE International Symposium on Semiconductor Manufacturing Conference Proceedings",

pages = "417--420",

booktitle = "ISSM 2006 Conference Proceedings - Fifteenth International Symposium on Semiconductor Manufacturing",

note = "ISSM 2006 - 15th International Symposium on Semiconductor Manufacturing ; Conference date: 25-09-2007 Through 27-09-2007",

}

TY - GEN

T1 - A new air cleaning and cooling instrument using oblique honeycomb

AU - Minobe, S.

AU - Terada, I.

AU - Motoyoshi, Y.

AU - Hanaoka, H.

AU - Shirai, Y.

AU - Ohmi, T.

PY - 2006/12/1

Y1 - 2006/12/1

N2 - A new instrument with unified fonctions of washing and cooling for the intake air to clean rooms was studied. Its structure is based on oblique honeycombs made of high purity alumina as contact media of air to water. The alumina medium releases less contaminant to pure water than the conventional. The instrument showed high efficiencies in air cooling as well as removal of inorganic chemicals in the air. These resulted in the shortening of their lengths, reducing the amount of recycling water and consequently lowering the pressure loss upon the air treatment. The new instrument can provide very clean environments with low operation costs.

AB - A new instrument with unified fonctions of washing and cooling for the intake air to clean rooms was studied. Its structure is based on oblique honeycombs made of high purity alumina as contact media of air to water. The alumina medium releases less contaminant to pure water than the conventional. The instrument showed high efficiencies in air cooling as well as removal of inorganic chemicals in the air. These resulted in the shortening of their lengths, reducing the amount of recycling water and consequently lowering the pressure loss upon the air treatment. The new instrument can provide very clean environments with low operation costs.

UR - http://www.scopus.com/inward/record.url?scp=50249126661&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=50249126661&partnerID=8YFLogxK

U2 - 10.1109/ISSM.2006.4493124

DO - 10.1109/ISSM.2006.4493124

M3 - Conference contribution

AN - SCOPUS:50249126661

SN - 9784990413804

T3 - IEEE International Symposium on Semiconductor Manufacturing Conference Proceedings

SP - 417

EP - 420

BT - ISSM 2006 Conference Proceedings - Fifteenth International Symposium on Semiconductor Manufacturing

T2 - ISSM 2006 - 15th International Symposium on Semiconductor Manufacturing

Y2 - 25 September 2007 through 27 September 2007

ER -

A new air cleaning and cooling instrument using oblique honeycomb

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