A new air cleaning and cooling instrument using oblique honeycomb

S. Minobe, I. Terada, Y. Motoyoshi, H. Hanaoka, Y. Shirai, T. Ohmi

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

A new instrument with unified fonctions of washing and cooling for the intake air to clean rooms was studied. Its structure is based on oblique honeycombs made of high purity alumina as contact media of air to water. The alumina medium releases less contaminant to pure water than the conventional. The instrument showed high efficiencies in air cooling as well as removal of inorganic chemicals in the air. These resulted in the shortening of their lengths, reducing the amount of recycling water and consequently lowering the pressure loss upon the air treatment. The new instrument can provide very clean environments with low operation costs.

Original languageEnglish
Title of host publicationISSM 2006 Conference Proceedings - Fifteenth International Symposium on Semiconductor Manufacturing
Pages417-420
Number of pages4
DOIs
Publication statusPublished - 2006 Dec 1
EventISSM 2006 - 15th International Symposium on Semiconductor Manufacturing - Tokyo, Japan
Duration: 2007 Sep 252007 Sep 27

Publication series

NameIEEE International Symposium on Semiconductor Manufacturing Conference Proceedings
ISSN (Print)1523-553X

Other

OtherISSM 2006 - 15th International Symposium on Semiconductor Manufacturing
Country/TerritoryJapan
CityTokyo
Period07/9/2507/9/27

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Engineering(all)
  • Industrial and Manufacturing Engineering
  • Electrical and Electronic Engineering

Fingerprint

Dive into the research topics of 'A new air cleaning and cooling instrument using oblique honeycomb'. Together they form a unique fingerprint.

Cite this