A nanoindentation instrument for mechanical property measurement of 3D micro/nano-structured surfaces

T. Motoki, W. Gao, S. Kiyono, T. Ono

Research output: Contribution to journalArticlepeer-review

27 Citations (Scopus)

Abstract

This paper presents a nanoindentation instrument for 3D micro/nano-structured surfaces made of soft metals such as LSI circuit patterns. The instrument can carry out indentations with high resolution in both the vertical direction (Z) and lateral directions (XY). An electro-polished tungsten probe with a tip diameter of 100 nm is used as the indenter. The indentation motion along the Z-direction is generated by a PZT actuator. The sample is mounted on the free-end of a steel cantilever. The indentation depth and load can be accurately obtained from the PZT displacement, cantilever spring constant and the cantilever deflection measured by a capacitance-type displacement sensor. Nanoindentation experiments are carried out on an aluminium sample in the vacuum chamber of a scanning electronic microscope. Experimental results demonstrate that the instrument has the ability to perform nanoindentation.

Original languageEnglish
Pages (from-to)495-499
Number of pages5
JournalMeasurement Science and Technology
Volume17
Issue number3
DOIs
Publication statusPublished - 2006 Mar 1

Keywords

  • Depth
  • Instrumentation
  • Load
  • Mechanical property
  • Micro/nano-structured surface
  • Nanoindentation
  • Scanning electron microscope
  • Tungsten indenter

ASJC Scopus subject areas

  • Instrumentation
  • Engineering (miscellaneous)
  • Applied Mathematics

Fingerprint Dive into the research topics of 'A nanoindentation instrument for mechanical property measurement of 3D micro/nano-structured surfaces'. Together they form a unique fingerprint.

Cite this